# this file is part of refractiveindex.info database
# refractiveindex.info database is in the public domain
# copyright and related rights waived via CC0 1.0

REFERENCES: |
    L. V. Rodriguez de Marcos, M. Christophersen, M. F. Batkis, J. G. del Hoyo, J. Patel, E. J. Wollack, J. A. Christodoulides, J. I. Larruquert, M. A. Quijada.
    Self-consistent optical properties of PEALD-Al<sub>2</sub>O<sub>3</sub> thin films.
    <a href="https://doi.org/10.1364/OME.562660"><i>Opt. Express</i> <b>7</b>, 1750-1764 (2016)</a>
    (Numerical data kindly provided by Luis Rodriguez de Marcos)
COMMENTS: |
    The aluminum oxide films were deposited by plasma-enhanced atomic layer deposition (PEALD) onto Si and MgF<sub>2</sub> substrates heated at 300 °C. Optical measurements (transmittance, reflectance, and ellipsometry) were performed over a very broad spectral range jointly covering from 58.4 nm to 43 μm. Using these measurements, along with suitable extrapolations, a Kramers-Kronig analysis procedure was applied to obtain a self-consistent set of optical properties that successfully reproduces the experimental data. Global and local self-consistency of the derived properties were satisfactorily evaluated through the application of sum rules.
DATA:
  - type: tabulated nk
    data: |
        3.10152E-06 0.999999995239093 8.93886E-12
        3.12186E-06 0.999999995179402 9.02444E-12
        3.14233E-06 0.999999995117490 9.10947E-12
        3.16294E-06 0.999999995054282 9.19394E-12
        3.18369E-06 0.999999994990002 9.27787E-12
        3.20457E-06 0.999999994924730 9.36124E-12
        3.22558E-06 0.999999994858502 9.44408E-12
        3.24674E-06 0.999999994791332 9.52637E-12
        3.26803E-06 0.999999994723221 9.60813E-12
        3.28946E-06 0.999999994654173 9.70052E-12
        3.31104E-06 0.999999994584187 9.79522E-12
        3.33275E-06 0.999999994513256 9.88930E-12
        3.35461E-06 0.999999994441371 9.98277E-12
        3.37661E-06 0.999999994368522 1.00756E-11
        3.39875E-06 0.999999994294699 1.01679E-11
        3.42104E-06 0.999999994219889 1.02595E-11
        3.44348E-06 0.999999994144082 1.03506E-11
        3.46606E-06 0.999999994067265 1.04411E-11
        3.48880E-06 0.999999993989424 1.05309E-11
        3.51168E-06 0.999999993910548 1.06292E-11
        3.53471E-06 0.999999993830629 1.07332E-11
        3.55789E-06 0.999999993749655 1.08365E-11
        3.58122E-06 0.999999993667611 1.09391E-11
        3.60471E-06 0.999999993584482 1.10411E-11
        3.62835E-06 0.999999993500255 1.11424E-11
        3.65215E-06 0.999999993414914 1.12430E-11
        3.67610E-06 0.999999993328444 1.13430E-11
        3.70021E-06 0.999999993240831 1.14423E-11
        3.72448E-06 0.999999993152058 1.15410E-11
        3.74890E-06 0.999999993062110 1.16453E-11
        3.77349E-06 0.999999992970977 1.17593E-11
        3.79824E-06 0.999999992878647 1.18726E-11
        3.82315E-06 0.999999992785100 1.19851E-11
        3.84822E-06 0.999999992690321 1.20969E-11
        3.87346E-06 0.999999992594292 1.22079E-11
        3.89886E-06 0.999999992496997 1.23182E-11
        3.92443E-06 0.999999992398419 1.24278E-11
        3.95017E-06 0.999999992298539 1.25367E-11
        3.97608E-06 0.999999992197341 1.26449E-11
        4.00215E-06 0.999999992094804 1.27556E-11
        4.02840E-06 0.999999991990918 1.28809E-11
        4.05482E-06 0.999999991885668 1.30054E-11
        4.08141E-06 0.999999991779034 1.31291E-11
        4.10818E-06 0.999999991670996 1.32520E-11
        4.13512E-06 0.999999991561536 1.33741E-11
        4.16224E-06 0.999999991450634 1.34954E-11
        4.18954E-06 0.999999991338271 1.36159E-11
        4.21702E-06 0.999999991224427 1.37357E-11
        4.24467E-06 0.999999991109081 1.38546E-11
        4.27251E-06 0.999999990992209 1.39728E-11
        4.30053E-06 0.999999990873799 1.41095E-11
        4.32874E-06 0.999999990753836 1.42460E-11
        4.35713E-06 0.999999990632296 1.43816E-11
        4.38570E-06 0.999999990509158 1.45164E-11
        4.41447E-06 0.999999990384399 1.46503E-11
        4.44342E-06 0.999999990257997 1.47833E-11
        4.47256E-06 0.999999990129931 1.49154E-11
        4.50189E-06 0.999999990000177 1.50467E-11
        4.53142E-06 0.999999989868712 1.51771E-11
        4.56113E-06 0.999999989735511 1.53066E-11
        4.59105E-06 0.999999989600555 1.54521E-11
        4.62116E-06 0.999999989463828 1.56020E-11
        4.65147E-06 0.999999989325305 1.57509E-11
        4.68197E-06 0.999999989184961 1.58988E-11
        4.71268E-06 0.999999989042770 1.60457E-11
        4.74358E-06 0.999999988898708 1.61917E-11
        4.77469E-06 0.999999988752749 1.63368E-11
        4.80601E-06 0.999999988604867 1.64809E-11
        4.83753E-06 0.999999988455037 1.66240E-11
        4.86925E-06 0.999999988303228 1.67663E-11
        4.90119E-06 0.999999988149419 1.69210E-11
        4.93333E-06 0.999999987993589 1.70856E-11
        4.96569E-06 0.999999987835714 1.72492E-11
        4.99825E-06 0.999999987675764 1.74117E-11
        5.03103E-06 0.999999987513709 1.75732E-11
        5.06403E-06 0.999999987349522 1.77336E-11
        5.09724E-06 0.999999987183174 1.78930E-11
        5.13067E-06 0.999999987014635 1.80513E-11
        5.16432E-06 0.999999986843876 1.82086E-11
        5.19819E-06 0.999999986670864 1.83648E-11
        5.23228E-06 0.999999986495570 1.85292E-11
        5.26660E-06 0.999999986317972 1.87097E-11
        5.30114E-06 0.999999986138043 1.88892E-11
        5.33590E-06 0.999999985955750 1.90674E-11
        5.37090E-06 0.999999985771059 1.92445E-11
        5.40612E-06 0.999999985583938 1.94204E-11
        5.44158E-06 0.999999985394355 1.95952E-11
        5.47726E-06 0.999999985202275 1.97688E-11
        5.51319E-06 0.999999985007665 1.99413E-11
        5.54934E-06 0.999999984810488 2.01127E-11
        5.58574E-06 0.999999984610710 2.02870E-11
        5.62237E-06 0.999999984408303 2.04856E-11
        5.65925E-06 0.999999984203242 2.06829E-11
        5.69636E-06 0.999999983995486 2.08789E-11
        5.73372E-06 0.999999983784998 2.10736E-11
        5.77132E-06 0.999999983571741 2.12671E-11
        5.80917E-06 0.999999983355677 2.14593E-11
        5.84727E-06 0.999999983136769 2.16502E-11
        5.88562E-06 0.999999982914978 2.18399E-11
        5.92422E-06 0.999999982690264 2.20284E-11
        5.96307E-06 0.999999982462583 2.22156E-11
        6.00218E-06 0.999999982231905 2.24315E-11
        6.04155E-06 0.999999981998201 2.26482E-11
        6.08117E-06 0.999999981761427 2.28635E-11
        6.12105E-06 0.999999981521539 2.30774E-11
        6.16119E-06 0.999999981278496 2.32899E-11
        6.20160E-06 0.999999981032254 2.35010E-11
        6.24227E-06 0.999999980782771 2.37108E-11
        6.28321E-06 0.999999980530002 2.39192E-11
        6.32442E-06 0.999999980273902 2.41262E-11
        6.36590E-06 0.999999980014424 2.43319E-11
        6.40765E-06 0.999999979751527 2.45619E-11
        6.44967E-06 0.999999979485180 2.48003E-11
        6.49197E-06 0.999999979215334 2.50372E-11
        6.53455E-06 0.999999978941940 2.52725E-11
        6.57740E-06 0.999999978664950 2.55063E-11
        6.62054E-06 0.999999978384315 2.57386E-11
        6.66396E-06 0.999999978099986 2.59693E-11
        6.70767E-06 0.999999977811913 2.61985E-11
        6.75166E-06 0.999999977520045 2.64263E-11
        6.79594E-06 0.999999977224328 2.66526E-11
        6.84051E-06 0.999999976924713 2.68977E-11
        6.88537E-06 0.999999976621161 2.71604E-11
        6.93053E-06 0.999999976313625 2.74213E-11
        6.97598E-06 0.999999976002045 2.76806E-11
        7.02173E-06 0.999999975686367 2.79382E-11
        7.06778E-06 0.999999975366535 2.81941E-11
        7.11413E-06 0.999999975042493 2.84483E-11
        7.16079E-06 0.999999974714186 2.87009E-11
        7.20775E-06 0.999999974381553 2.89519E-11
        7.25502E-06 0.999999974044535 2.92012E-11
        7.30261E-06 0.999999973703072 2.94623E-11
        7.35050E-06 0.999999973357121 2.97520E-11
        7.39871E-06 0.999999973006628 3.00399E-11
        7.44723E-06 0.999999972651528 3.03258E-11
        7.49607E-06 0.999999972291758 3.06100E-11
        7.54523E-06 0.999999971927254 3.08922E-11
        7.59472E-06 0.999999971557953 3.11726E-11
        7.64453E-06 0.999999971183790 3.14512E-11
        7.69466E-06 0.999999970804699 3.17280E-11
        7.74513E-06 0.999999970420611 3.20030E-11
        7.79592E-06 0.999999970031456 3.22810E-11
        7.84705E-06 0.999999969637181 3.26007E-11
        7.89851E-06 0.999999969237732 3.29183E-11
        7.95031E-06 0.999999968833032 3.32338E-11
        8.00246E-06 0.999999968423010 3.35473E-11
        8.05494E-06 0.999999968007594 3.38587E-11
        8.10777E-06 0.999999967586710 3.41681E-11
        8.16094E-06 0.999999967160285 3.44755E-11
        8.21446E-06 0.999999966728244 3.47809E-11
        8.26833E-06 0.999999966290511 3.50843E-11
        8.32256E-06 0.999999965847001 3.53857E-11
        8.37714E-06 0.999999965397652 3.57341E-11
        8.43208E-06 0.999999964942406 3.60860E-11
        8.48738E-06 0.999999964481177 3.64357E-11
        8.54305E-06 0.999999964013883 3.67831E-11
        8.59908E-06 0.999999963540440 3.71282E-11
        8.65547E-06 0.999999963060767 3.74711E-11
        8.71224E-06 0.999999962574780 3.78117E-11
        8.76938E-06 0.999999962082393 3.81501E-11
        8.82689E-06 0.999999961583518 3.84863E-11
        8.88478E-06 0.999999961078062 3.88203E-11
        8.94305E-06 0.999999960565949 3.91943E-11
        9.00170E-06 0.999999960047109 3.95850E-11
        9.06074E-06 0.999999959521453 3.99731E-11
        9.12016E-06 0.999999958988885 4.03588E-11
        9.17997E-06 0.999999958449310 4.07419E-11
        9.24018E-06 0.999999957902635 4.11226E-11
        9.30078E-06 0.999999957348764 4.15007E-11
        9.36178E-06 0.999999956787599 4.18764E-11
        9.42317E-06 0.999999956219041 4.22497E-11
        9.48497E-06 0.999999955642986 4.26205E-11
        9.54718E-06 0.999999955059338 4.30219E-11
        9.60979E-06 0.999999954468019 4.34568E-11
        9.67282E-06 0.999999953868934 4.38887E-11
        9.73626E-06 0.999999953261972 4.43179E-11
        9.80011E-06 0.999999952647026 4.47443E-11
        9.86438E-06 0.999999952023987 4.51679E-11
        9.92908E-06 0.999999951392746 4.55887E-11
        9.99419E-06 0.999999950753194 4.60068E-11
        1.00597E-05 0.999999950105217 4.64222E-11
        1.01257E-05 0.999999949448697 4.68349E-11
        1.01921E-05 0.999999948783519 4.72664E-11
        1.02590E-05 0.999999948109593 4.77528E-11
        1.03262E-05 0.999999947426819 4.82360E-11
        1.03940E-05 0.999999946735068 4.87161E-11
        1.04621E-05 0.999999946034218 4.91930E-11
        1.05308E-05 0.999999945324145 4.96669E-11
        1.05998E-05 0.999999944604725 5.01376E-11
        1.06693E-05 0.999999943875833 5.06053E-11
        1.07393E-05 0.999999943137341 5.10700E-11
        1.08097E-05 0.999999942389114 5.15316E-11
        1.08806E-05 0.999999941631015 5.19959E-11
        1.09520E-05 0.999999940862939 5.25415E-11
        1.10238E-05 0.999999940084782 5.30836E-11
        1.10961E-05 0.999999939296394 5.36221E-11
        1.11689E-05 0.999999938497637 5.41570E-11
        1.12421E-05 0.999999937688368 5.46885E-11
        1.13159E-05 0.999999936868448 5.52166E-11
        1.13901E-05 0.999999936037731 5.57412E-11
        1.14648E-05 0.999999935196073 5.62624E-11
        1.15400E-05 0.999999934343324 5.67801E-11
        1.16157E-05 0.999999933479320 5.72946E-11
        1.16918E-05 0.999999932603940 5.78953E-11
        1.17685E-05 0.999999931717067 5.85070E-11
        1.18457E-05 0.999999930818538 5.91147E-11
        1.19234E-05 0.999999929908190 5.97185E-11
        1.20016E-05 0.999999928985863 6.03183E-11
        1.20803E-05 0.999999928051397 6.09143E-11
        1.21595E-05 0.999999927104626 6.15063E-11
        1.22393E-05 0.999999926145386 6.20945E-11
        1.23195E-05 0.999999925173506 6.26789E-11
        1.24003E-05 0.999999924188802 6.32594E-11
        1.24817E-05 0.999999923191125 6.39151E-11
        1.25635E-05 0.999999922180340 6.46088E-11
        1.26459E-05 0.999999921156275 6.52981E-11
        1.27289E-05 0.999999920118742 6.59828E-11
        1.28123E-05 0.999999919067557 6.66631E-11
        1.28964E-05 0.999999918002536 6.73390E-11
        1.29809E-05 0.999999916923493 6.80105E-11
        1.30661E-05 0.999999915830237 6.86776E-11
        1.31518E-05 0.999999914722576 6.93403E-11
        1.32380E-05 0.999999913600304 6.99987E-11
        1.33248E-05 0.999999912463234 7.07162E-11
        1.34122E-05 0.999999911311218 7.15087E-11
        1.35002E-05 0.999999910144070 7.22959E-11
        1.35887E-05 0.999999908961575 7.30781E-11
        1.36778E-05 0.999999907763521 7.38552E-11
        1.37676E-05 0.999999906549699 7.46271E-11
        1.38578E-05 0.999999905319895 7.53941E-11
        1.39487E-05 0.999999904073893 7.61561E-11
        1.40402E-05 0.999999902811474 7.69131E-11
        1.41323E-05 0.999999901532406 7.76651E-11
        1.42250E-05 0.999999900236461 7.84521E-11
        1.43183E-05 0.999999898923470 7.93631E-11
        1.44122E-05 0.999999897593240 8.02681E-11
        1.45067E-05 0.999999896245520 8.11672E-11
        1.46018E-05 0.999999894880068 8.20604E-11
        1.46976E-05 0.999999893496644 8.29479E-11
        1.47940E-05 0.999999892095006 8.38295E-11
        1.48910E-05 0.999999890674907 8.47054E-11
        1.49887E-05 0.999999889236098 8.55756E-11
        1.50870E-05 0.999999887778317 8.64401E-11
        1.51859E-05 0.999999886301284 8.73048E-11
        1.52855E-05 0.999999884804810 8.83614E-11
        1.53858E-05 0.999999883288698 8.94111E-11
        1.54867E-05 0.999999881752654 9.04539E-11
        1.55882E-05 0.999999880196403 9.14900E-11
        1.56905E-05 0.999999878619668 9.25193E-11
        1.57934E-05 0.999999877022175 9.35420E-11
        1.58969E-05 0.999999875403641 9.45579E-11
        1.60012E-05 0.999999873763781 9.55673E-11
        1.61061E-05 0.999999872102300 9.65700E-11
        1.62118E-05 0.999999870418877 9.75663E-11
        1.63181E-05 0.999999868713278 9.87573E-11
        1.64251E-05 0.999999866985288 9.99843E-11
        1.65328E-05 0.999999865234589 1.01203E-10
        1.66413E-05 0.999999863460862 1.02414E-10
        1.67504E-05 0.999999861663790 1.03618E-10
        1.68603E-05 0.999999859843059 1.04813E-10
        1.69708E-05 0.999999857998346 1.06001E-10
        1.70821E-05 0.999999856129327 1.07181E-10
        1.71942E-05 0.999999854235665 1.08353E-10
        1.73069E-05 0.999999852316997 1.09517E-10
        1.74204E-05 0.999999850373034 1.10858E-10
        1.75347E-05 0.999999848403534 1.12305E-10
        1.76497E-05 0.999999846408164 1.13742E-10
        1.77654E-05 0.999999844386551 1.15170E-10
        1.78820E-05 0.999999842338333 1.16589E-10
        1.79992E-05 0.999999840263149 1.17998E-10
        1.81173E-05 0.999999838160632 1.19399E-10
        1.82361E-05 0.999999836030410 1.20790E-10
        1.83557E-05 0.999999833872102 1.22172E-10
        1.84761E-05 0.999999831685297 1.23545E-10
        1.85973E-05 0.999999829469632 1.25059E-10
        1.87192E-05 0.999999827224842 1.26782E-10
        1.88420E-05 0.999999824950583 1.28493E-10
        1.89656E-05 0.999999822646418 1.30193E-10
        1.90899E-05 0.999999820311933 1.31882E-10
        1.92151E-05 0.999999817946713 1.33560E-10
        1.93412E-05 0.999999815550339 1.35227E-10
        1.94680E-05 0.999999813122389 1.36883E-10
        1.95957E-05 0.999999810662425 1.38528E-10
        1.97242E-05 0.999999808169989 1.40163E-10
        1.98536E-05 0.999999805644620 1.41878E-10
        1.99838E-05 0.999999803086027 1.43947E-10
        2.01148E-05 0.999999800493870 1.46002E-10
        2.02467E-05 0.999999797867634 1.48044E-10
        2.03795E-05 0.999999795206843 1.50072E-10
        2.05132E-05 0.999999792511022 1.52087E-10
        2.06477E-05 0.999999789779693 1.54089E-10
        2.07831E-05 0.999999787012371 1.56078E-10
        2.09194E-05 0.999999784208562 1.58054E-10
        2.10566E-05 0.999999781367749 1.60018E-10
        2.11947E-05 0.999999778489350 1.61968E-10
        2.13337E-05 0.999999775573045 1.64472E-10
        2.14736E-05 0.999999772618513 1.66964E-10
        2.16145E-05 0.999999769625151 1.69439E-10
        2.17562E-05 0.999999766592407 1.71899E-10
        2.18989E-05 0.999999763519738 1.74343E-10
        2.20425E-05 0.999999760406597 1.76770E-10
        2.21871E-05 0.999999757252430 1.79182E-10
        2.23326E-05 0.999999754056671 1.81578E-10
        2.24791E-05 0.999999750818732 1.83959E-10
        2.26265E-05 0.999999747537951 1.86324E-10
        2.27749E-05 0.999999744213917 1.89238E-10
        2.29243E-05 0.999999740846282 1.92287E-10
        2.30746E-05 0.999999737434420 1.95316E-10
        2.32259E-05 0.999999733977681 1.98326E-10
        2.33783E-05 0.999999730475439 2.01315E-10
        2.35316E-05 0.999999726927068 2.04286E-10
        2.36859E-05 0.999999723331933 2.07237E-10
        2.38413E-05 0.999999719689388 2.10169E-10
        2.39976E-05 0.999999715998760 2.13081E-10
        2.41550E-05 0.999999712259305 2.15975E-10
        2.43134E-05 0.999999708470480 2.19377E-10
        2.44729E-05 0.999999704631917 2.23140E-10
        2.46334E-05 0.999999700742986 2.26878E-10
        2.47949E-05 0.999999696802921 2.30593E-10
        2.49575E-05 0.999999692810996 2.34283E-10
        2.51212E-05 0.999999688766494 2.37948E-10
        2.52860E-05 0.999999684668688 2.41590E-10
        2.54518E-05 0.999999680516840 2.45209E-10
        2.56187E-05 0.999999676310181 2.48803E-10
        2.57868E-05 0.999999672047874 2.52375E-10
        2.59559E-05 0.999999667729197 2.56354E-10
        2.61261E-05 0.999999663353770 2.61036E-10
        2.62974E-05 0.999999658920994 2.65688E-10
        2.64699E-05 0.999999654429955 2.70309E-10
        2.66435E-05 0.999999649879816 2.74901E-10
        2.68182E-05 0.999999645269750 2.79462E-10
        2.69941E-05 0.999999640598926 2.83994E-10
        2.71712E-05 0.999999635866498 2.88496E-10
        2.73494E-05 0.999999631071593 2.92969E-10
        2.75287E-05 0.999999626213269 2.97412E-10
        2.77093E-05 0.999999621290559 3.02071E-10
        2.78910E-05 0.999999616303079 3.07943E-10
        2.80739E-05 0.999999611250319 3.13776E-10
        2.82580E-05 0.999999606131180 3.19572E-10
        2.84434E-05 0.999999600944691 3.25329E-10
        2.86299E-05 0.999999595689901 3.31049E-10
        2.88177E-05 0.999999590365857 3.36732E-10
        2.90067E-05 0.999999584971591 3.42378E-10
        2.91969E-05 0.999999579506107 3.47987E-10
        2.93884E-05 0.999999573968349 3.53559E-10
        2.95811E-05 0.999999568357053 3.59096E-10
        2.97751E-05 0.999999562671809 3.66428E-10
        2.99704E-05 0.999999556912240 3.73797E-10
        3.01670E-05 0.999999551077064 3.81117E-10
        3.03648E-05 0.999999545165145 3.88389E-10
        3.05640E-05 0.999999539175385 3.95614E-10
        3.07644E-05 0.999999533106689 4.02792E-10
        3.09662E-05 0.999999526957946 4.09924E-10
        3.11693E-05 0.999999520728016 4.17008E-10
        3.13737E-05 0.999999514415689 4.24047E-10
        3.15794E-05 0.999999508019534 4.31040E-10
        3.17865E-05 0.999999501538922 4.39841E-10
        3.19950E-05 0.999999494973511 4.49204E-10
        3.22048E-05 0.999999488322047 4.58505E-10
        3.24161E-05 0.999999481583159 4.67746E-10
        3.26286E-05 0.999999474755571 4.76927E-10
        3.28426E-05 0.999999467838023 4.86048E-10
        3.30580E-05 0.999999460829240 4.95110E-10
        3.32748E-05 0.999999453727916 5.04112E-10
        3.34931E-05 0.999999446532670 5.13056E-10
        3.37127E-05 0.999999439241886 5.21941E-10
        3.39338E-05 0.999999431854610 5.32511E-10
        3.41564E-05 0.999999424370576 5.44478E-10
        3.43804E-05 0.999999416788660 5.56368E-10
        3.46059E-05 0.999999409107202 5.68180E-10
        3.48328E-05 0.999999401324722 5.79915E-10
        3.50613E-05 0.999999393439778 5.91573E-10
        3.52912E-05 0.999999385450928 6.03156E-10
        3.55227E-05 0.999999377356707 6.14663E-10
        3.57556E-05 0.999999369155605 6.26095E-10
        3.59901E-05 0.999999360845981 6.37452E-10
        3.62262E-05 0.999999352426374 6.49473E-10
        3.64638E-05 0.999999343896002 6.62872E-10
        3.67029E-05 0.999999335253711 6.76185E-10
        3.69436E-05 0.999999326497698 6.89411E-10
        3.71859E-05 0.999999317626312 7.02550E-10
        3.74298E-05 0.999999308637922 7.15604E-10
        3.76753E-05 0.999999299530883 7.28573E-10
        3.79223E-05 0.999999290303512 7.41458E-10
        3.81710E-05 0.999999280954061 7.54258E-10
        3.84214E-05 0.999999271480615 7.66975E-10
        3.86734E-05 0.999999261881106 7.80134E-10
        3.89270E-05 0.999999252155154 7.96776E-10
        3.91823E-05 0.999999242302110 8.13309E-10
        3.94393E-05 0.999999232319628 8.29735E-10
        3.96979E-05 0.999999222205737 8.46054E-10
        3.99583E-05 0.999999211958534 8.62267E-10
        4.02203E-05 0.999999201576127 8.78373E-10
        4.04841E-05 0.999999191056599 8.94375E-10
        4.07496E-05 0.999999180397990 9.10273E-10
        4.10169E-05 0.999999169598239 9.26067E-10
        4.12859E-05 0.999999158654947 9.41758E-10
        4.15567E-05 0.999999147567125 9.60298E-10
        4.18292E-05 0.999999136333403 9.78208E-10
        4.21035E-05 0.999999124951313 9.96876E-10
        4.23797E-05 0.999999113418974 1.01574E-09
        4.26576E-05 0.999999101734355 1.03523E-09
        4.29374E-05 0.999999089895490 1.05506E-09
        4.32190E-05 0.999999077900296 1.07536E-09
        4.35024E-05 0.999999065746780 1.09614E-09
        4.37877E-05 0.999999053432770 1.11708E-09
        4.40749E-05 0.999999040956013 1.13836E-09
        4.43639E-05 0.999999028314211 1.15982E-09
        4.46549E-05 0.999999015505245 1.18206E-09
        4.49478E-05 0.999999002526820 1.20433E-09
        4.52425E-05 0.999998989376669 1.22753E-09
        4.55393E-05 0.999998976052334 1.25062E-09
        4.58379E-05 0.999998962551605 1.27526E-09
        4.61385E-05 0.999998948872185 1.29974E-09
        4.64411E-05 0.999998935011108 1.32480E-09
        4.67457E-05 0.999998920964828 1.34977E-09
        4.70523E-05 0.999998906732397 1.38122E-09
        4.73609E-05 0.999998892313570 1.41423E-09
        4.76715E-05 0.999998877705371 1.44828E-09
        4.79841E-05 0.999998862904731 1.48272E-09
        4.82988E-05 0.999998847908880 1.51853E-09
        4.86156E-05 0.999998832715400 1.55536E-09
        4.89344E-05 0.999998817321535 1.59300E-09
        4.92554E-05 0.999998801724578 1.63176E-09
        4.95784E-05 0.999998785921669 1.67118E-09
        4.99035E-05 0.999998769910233 1.71233E-09
        5.02308E-05 0.999998753687403 1.75380E-09
        5.05603E-05 0.999998737250479 1.79735E-09
        5.08918E-05 0.999998720596488 1.84086E-09
        5.12256E-05 0.999998703722612 1.88681E-09
        5.15616E-05 0.999998686625774 1.93245E-09
        5.18997E-05 0.999998669303138 1.98116E-09
        5.22401E-05 0.999998651751852 2.02967E-09
        5.25827E-05 0.999998633968760 2.08084E-09
        5.29276E-05 0.999998615950922 2.13222E-09
        5.32747E-05 0.999998597695082 2.18586E-09
        5.36241E-05 0.999998579198197 2.24010E-09
        5.39758E-05 0.999998560456893 2.29619E-09
        5.43298E-05 0.999998541467979 2.35331E-09
        5.46861E-05 0.999998522228010 2.41209E-09
        5.50447E-05 0.999998502733814 2.47256E-09
        5.54057E-05 0.999998482981877 2.53439E-09
        5.57691E-05 0.999998462969044 2.59868E-09
        5.61349E-05 0.999998442691720 2.66378E-09
        5.65030E-05 0.999998422146592 2.73191E-09
        5.68736E-05 0.999998401329928 2.80027E-09
        5.72466E-05 0.999998380238285 2.87224E-09
        5.76220E-05 0.999998358867789 2.94386E-09
        5.79999E-05 0.999998337214801 3.01968E-09
        5.83803E-05 0.999998315275444 3.09500E-09
        5.87632E-05 0.999998293045969 3.17508E-09
        5.91486E-05 0.999998270522808 3.25518E-09
        5.95365E-05 0.999998247701874 3.33936E-09
        5.99269E-05 0.999998224579446 3.42424E-09
        6.03200E-05 0.999998201151276 3.51253E-09
        6.07156E-05 0.999998177413455 3.60218E-09
        6.11138E-05 0.999998153361646 3.69483E-09
        6.15146E-05 0.999998128991932 3.78975E-09
        6.19180E-05 0.999998104299876 3.88710E-09
        6.23241E-05 0.999998079281579 3.98776E-09
        6.27328E-05 0.999998053932455 4.08987E-09
        6.31442E-05 0.999998028248188 4.19582E-09
        6.35584E-05 0.999998002223913 4.30260E-09
        6.39752E-05 0.999997975855506 4.41478E-09
        6.43948E-05 0.999997949138072 4.52690E-09
        6.48171E-05 0.999997922067362 4.64580E-09
        6.52422E-05 0.999997894638543 4.76392E-09
        6.56701E-05 0.999997866846894 4.88925E-09
        6.61008E-05 0.999997838687741 5.01405E-09
        6.65343E-05 0.999997810155908 5.14554E-09
        6.69706E-05 0.999997781246712 5.27751E-09
        6.74099E-05 0.999997751954832 5.41549E-09
        6.78520E-05 0.999997722275501 5.55511E-09
        6.82969E-05 0.999997692203224 5.69994E-09
        6.87449E-05 0.999997661733111 5.84769E-09
        6.91957E-05 0.999997630859566 5.99995E-09
        6.96495E-05 0.999997599577866 6.15679E-09
        7.01063E-05 0.999997567882170 6.31646E-09
        7.05661E-05 0.999997535767026 6.48146E-09
        7.10289E-05 0.999997503226232 6.64856E-09
        7.14947E-05 0.999997470254865 6.82362E-09
        7.19636E-05 0.999997436846808 6.99929E-09
        7.24356E-05 0.999997402996692 7.18443E-09
        7.29106E-05 0.999997368697979 7.36869E-09
        7.33888E-05 0.999997333945273 7.56487E-09
        7.38701E-05 0.999997298732758 7.75977E-09
        7.43546E-05 0.999997263053911 7.96572E-09
        7.48422E-05 0.999997226902826 8.17161E-09
        7.53331E-05 0.999997190272774 8.38775E-09
        7.58271E-05 0.999997153157916 8.60559E-09
        7.63244E-05 0.999997115551249 8.83230E-09
        7.68250E-05 0.999997077446717 9.06257E-09
        7.73288E-05 0.999997038837125 9.30045E-09
        7.78360E-05 0.999996999716411 9.54412E-09
        7.83465E-05 0.999996960077118 9.79366E-09
        7.88603E-05 0.999996919912909 1.00512E-08
        7.93775E-05 0.999996879216067 1.03131E-08
        7.98981E-05 0.999996837980395 1.05860E-08
        8.04221E-05 0.999996796198024 1.08610E-08
        8.09495E-05 0.999996753862465 1.11497E-08
        8.14804E-05 0.999996710965515 1.14382E-08
        8.20148E-05 0.999996667500379 1.17432E-08
        8.25527E-05 0.999996623458863 1.20463E-08
        8.30941E-05 0.999996578833503 1.23679E-08
        8.36390E-05 0.999996533616921 1.26882E-08
        8.41876E-05 0.999996487800562 1.30257E-08
        8.47397E-05 0.999996441377222 1.33646E-08
        8.52954E-05 0.999996394338002 1.37189E-08
        8.58548E-05 0.999996346675499 1.40774E-08
        8.64179E-05 0.999996298380581 1.44493E-08
        8.69847E-05 0.999996249445887 1.48289E-08
        8.75551E-05 0.999996199861895 1.52190E-08
        8.81294E-05 0.999996149620833 1.56201E-08
        8.87073E-05 0.999996098712806 1.60293E-08
        8.92891E-05 0.999996047129989 1.64533E-08
        8.98747E-05 0.999995994862171 1.68825E-08
        9.04641E-05 0.999995941901614 1.73316E-08
        9.10574E-05 0.999995888237863 1.77821E-08
        9.16546E-05 0.999995833862834 1.82570E-08
        9.22557E-05 0.999995778765569 1.87296E-08
        9.28608E-05 0.999995722937405 1.92315E-08
        9.34698E-05 0.999995666368613 1.97300E-08
        9.40828E-05 0.999995609048769 2.02578E-08
        9.46998E-05 0.999995550969071 2.07854E-08
        9.53209E-05 0.999995492118042 2.13390E-08
        9.59460E-05 0.999995432486534 2.18968E-08
        9.65753E-05 0.999995372062762 2.24774E-08
        9.72087E-05 0.999995310837491 2.30672E-08
        9.78462E-05 0.999995248798610 2.36766E-08
        9.84879E-05 0.999995185937009 2.43009E-08
        9.91338E-05 0.999995122240058 2.49401E-08
        9.97840E-05 0.999995057698077 2.55999E-08
        1.00438E-04 0.999994992297902 2.62702E-08
        1.01097E-04 0.999994926030094 2.69683E-08
        1.01760E-04 0.999994858881140 2.76717E-08
        1.02428E-04 0.999994790841318 2.84101E-08
        1.03099E-04 0.999994721896524 2.91479E-08
        1.03775E-04 0.999994652036602 2.99286E-08
        1.04456E-04 0.999994581247852 3.07041E-08
        1.05141E-04 0.999994509518491 3.15275E-08
        1.05831E-04 0.999994436837176 3.23474E-08
        1.06525E-04 0.999994363189318 3.32113E-08
        1.07223E-04 0.999994288563952 3.40786E-08
        1.07927E-04 0.999994212945930 3.49849E-08
        1.08634E-04 0.999994136324054 3.59018E-08
        1.09347E-04 0.999994058682636 3.68524E-08
        1.10064E-04 0.999993980010356 3.78220E-08
        1.10786E-04 0.999993900290987 3.88193E-08
        1.11512E-04 0.999993819513269 3.98449E-08
        1.12244E-04 0.999993737660326 4.08909E-08
        1.12980E-04 0.999993654720454 4.19750E-08
        1.13721E-04 0.999993570676027 4.30718E-08
        1.14467E-04 0.999993485515491 4.42182E-08
        1.15217E-04 0.999993399220635 4.53684E-08
        1.15973E-04 0.999993311779457 4.65801E-08
        1.16734E-04 0.999993223172618 4.77858E-08
        1.17499E-04 0.999993133387538 4.90672E-08
        1.18270E-04 0.999993042409108 5.03402E-08
        1.19045E-04 0.999992950219470 5.16865E-08
        1.19826E-04 0.999992856805060 5.30325E-08
        1.20612E-04 0.999992762146416 5.44449E-08
        1.21403E-04 0.999992666230235 5.58684E-08
        1.22199E-04 0.999992569036124 5.73495E-08
        1.23001E-04 0.999992470550255 5.88538E-08
        1.23807E-04 0.999992370751654 6.04072E-08
        1.24619E-04 0.999992269627004 6.19981E-08
        1.25437E-04 0.999992167154343 6.36268E-08
        1.26259E-04 0.999992063319387 6.53073E-08
        1.27087E-04 0.999991958099142 6.70146E-08
        1.27921E-04 0.999991851480185 6.87920E-08
        1.28760E-04 0.999991743438903 7.05826E-08
        1.29604E-04 0.999991633961180 7.24612E-08
        1.30454E-04 0.999991523021952 7.43383E-08
        1.31310E-04 0.999991410606841 7.63245E-08
        1.32171E-04 0.999991296692576 7.82977E-08
        1.33038E-04 0.999991181260660 8.03922E-08
        1.33910E-04 0.999991064294043 8.24781E-08
        1.34789E-04 0.999990945767190 8.46746E-08
        1.35673E-04 0.999990825663818 8.68795E-08
        1.36562E-04 0.999990703957807 8.91837E-08
        1.37458E-04 0.999990580633412 9.15153E-08
        1.38359E-04 0.999990455663093 9.39312E-08
        1.39267E-04 0.999990329030393 9.63949E-08
        1.40180E-04 0.999990200706679 9.89277E-08
        1.41100E-04 0.999990070675857 1.01532E-07
        1.42025E-04 0.999989938908095 1.04187E-07
        1.42956E-04 0.999989805387170 1.06939E-07
        1.43894E-04 0.999989670081887 1.09723E-07
        1.44838E-04 0.999989532976387 1.12633E-07
        1.45788E-04 0.999989394038199 1.15551E-07
        1.46744E-04 0.999989253251140 1.18626E-07
        1.47706E-04 0.999989110580763 1.21686E-07
        1.48675E-04 0.999988966008880 1.24935E-07
        1.49650E-04 0.999988819511321 1.28163E-07
        1.50631E-04 0.999988671057757 1.31576E-07
        1.51619E-04 0.999988520629114 1.34989E-07
        1.52614E-04 0.999988368190578 1.38567E-07
        1.53614E-04 0.999988213722808 1.42172E-07
        1.54622E-04 0.999988057189889 1.45922E-07
        1.55636E-04 0.999987898572913 1.49732E-07
        1.56657E-04 0.999987737834496 1.53664E-07
        1.57684E-04 0.999987574956221 1.57690E-07
        1.58718E-04 0.999987409899007 1.61813E-07
        1.59759E-04 0.999987242644629 1.66068E-07
        1.60807E-04 0.999987073152138 1.70389E-07
        1.61862E-04 0.999986901403288 1.74886E-07
        1.62923E-04 0.999986727355041 1.79415E-07
        1.63992E-04 0.999986550989405 1.84166E-07
        1.65067E-04 0.999986372260966 1.88913E-07
        1.66150E-04 0.999986191150899 1.93934E-07
        1.67239E-04 0.999986007618657 1.98922E-07
        1.68336E-04 0.999985821635251 2.04213E-07
        1.69440E-04 0.999985633175647 2.09482E-07
        1.70551E-04 0.999985442194660 2.15029E-07
        1.71670E-04 0.999985248670844 2.20597E-07
        1.72796E-04 0.999985052556803 2.26412E-07
        1.73929E-04 0.999984853830882 2.32294E-07
        1.75070E-04 0.999984652443815 2.38389E-07
        1.76218E-04 0.999984448375056 2.44605E-07
        1.77374E-04 0.999984241572844 2.50993E-07
        1.78537E-04 0.999984032016621 2.57559E-07
        1.79708E-04 0.999983819652018 2.64254E-07
        1.80886E-04 0.999983604459416 2.71191E-07
        1.82073E-04 0.999983386381827 2.78207E-07
        1.83267E-04 0.999983165400459 2.85537E-07
        1.84469E-04 0.999982941455449 2.92889E-07
        1.85679E-04 0.999982714527606 3.00631E-07
        1.86896E-04 0.999982484552213 3.08334E-07
        1.88122E-04 0.999982251507185 3.16513E-07
        1.89356E-04 0.999982015356272 3.24640E-07
        1.90598E-04 0.999981776044880 3.33224E-07
        1.91848E-04 0.999981533546976 3.41807E-07
        1.93106E-04 0.999981287800160 3.50804E-07
        1.94372E-04 0.999981038781247 3.59871E-07
        1.95647E-04 0.999980786424684 3.69300E-07
        1.96930E-04 0.999980530707783 3.78876E-07
        1.98222E-04 0.999980271562030 3.88758E-07
        1.99522E-04 0.999980008966745 3.98874E-07
        2.00830E-04 0.999979742849891 4.09228E-07
        2.02147E-04 0.999979473191633 4.19913E-07
        2.03473E-04 0.999979199915542 4.30759E-07
        2.04808E-04 0.999978922999740 4.42036E-07
        2.06151E-04 0.999978642362166 4.53397E-07
        2.07503E-04 0.999978357990557 4.65320E-07
        2.08864E-04 0.999978069803666 4.77231E-07
        2.10234E-04 0.999977777777564 4.89813E-07
        2.11612E-04 0.999977481836490 5.02313E-07
        2.13000E-04 0.999977181938282 5.15566E-07
        2.14397E-04 0.999976878050929 5.28766E-07
        2.15803E-04 0.999976570090575 5.42654E-07
        2.17218E-04 0.999976258032732 5.56593E-07
        2.18643E-04 0.999975941789807 5.71142E-07
        2.20077E-04 0.999975621338476 5.85861E-07
        2.21520E-04 0.999975296587392 6.01106E-07
        2.22973E-04 0.999974967516890 6.16651E-07
        2.24436E-04 0.999974634031278 6.32628E-07
        2.25907E-04 0.999974296115065 6.49049E-07
        2.27389E-04 0.999973953666457 6.65784E-07
        2.28880E-04 0.999973606665856 6.83113E-07
        2.30381E-04 0.999973255003725 7.00636E-07
        2.31892E-04 0.999972898667064 7.18932E-07
        2.33413E-04 0.999972537541369 7.37283E-07
        2.34944E-04 0.999972171615265 7.56601E-07
        2.36485E-04 0.999971800764833 7.75820E-07
        2.38036E-04 0.999971424970617 7.96219E-07
        2.39597E-04 0.999971044179707 8.16484E-07
        2.41168E-04 0.999970658293390 8.37881E-07
        2.42750E-04 0.999970267285515 8.59273E-07
        2.44342E-04 0.999969871037992 8.81683E-07
        2.45944E-04 0.999969469529659 9.04263E-07
        2.47557E-04 0.999969062637975 9.27736E-07
        2.49181E-04 0.999968650347679 9.51574E-07
        2.50815E-04 0.999968232529512 9.76161E-07
        2.52460E-04 0.999967809172869 1.00133E-06
        2.54116E-04 0.999967380139456 1.02707E-06
        2.55782E-04 0.999966945416057 1.05362E-06
        2.57460E-04 0.999966504855447 1.08057E-06
        2.59148E-04 0.999966058457358 1.10861E-06
        2.60848E-04 0.999965606068964 1.13683E-06
        2.62559E-04 0.999965147688628 1.16642E-06
        2.64281E-04 0.999964683149807 1.19597E-06
        2.66014E-04 0.999964212447861 1.22719E-06
        2.67759E-04 0.999963735448840 1.25820E-06
        2.69515E-04 0.999963252092427 1.29107E-06
        2.71282E-04 0.999962762346434 1.32380E-06
        2.73061E-04 0.999962266053373 1.35822E-06
        2.74852E-04 0.999961763204315 1.39278E-06
        2.76655E-04 0.999961253631021 1.42882E-06
        2.78469E-04 0.999960737324256 1.46527E-06
        2.80295E-04 0.999960214108487 1.50300E-06
        2.82134E-04 0.999959683984280 1.54146E-06
        2.83984E-04 0.999959146765905 1.58096E-06
        2.85847E-04 0.999958602460721 1.62154E-06
        2.87721E-04 0.999958050871207 1.66289E-06
        2.89608E-04 0.999957492009803 1.70570E-06
        2.91508E-04 0.999956925665843 1.74898E-06
        2.93419E-04 0.999956351860558 1.79415E-06
        2.95344E-04 0.999955770369614 1.83945E-06
        2.97281E-04 0.999955181221346 1.88710E-06
        2.99230E-04 0.999954584171934 1.93451E-06
        3.01193E-04 0.999953979227493 1.98479E-06
        3.03168E-04 0.999953366315564 2.03473E-06
        3.05156E-04 0.999952745254829 2.08743E-06
        3.07158E-04 0.999952116041335 2.14012E-06
        3.09172E-04 0.999951478456923 2.19530E-06
        3.11200E-04 0.999950832529200 2.25090E-06
        3.13241E-04 0.999950178011510 2.30862E-06
        3.15295E-04 0.999949514910400 2.36720E-06
        3.17363E-04 0.999948842973416 2.42759E-06
        3.19444E-04 0.999948162239632 2.48937E-06
        3.21539E-04 0.999947472442390 2.55256E-06
        3.23648E-04 0.999946773626093 2.61770E-06
        3.25771E-04 0.999946065505187 2.68380E-06
        3.27907E-04 0.999945348136056 2.75248E-06
        3.30058E-04 0.999944621213797 2.82162E-06
        3.32222E-04 0.999943884806266 2.89404E-06
        3.34401E-04 0.999943138583644 2.96636E-06
        3.36594E-04 0.999942382608870 3.04270E-06
        3.38802E-04 0.999941616638739 3.11855E-06
        3.41024E-04 0.999940840599978 3.19883E-06
        3.43260E-04 0.999940054498528 3.27880E-06
        3.45512E-04 0.999939258014890 3.36276E-06
        3.47778E-04 0.999938451183118 3.44701E-06
        3.50059E-04 0.999937633687234 3.53484E-06
        3.52354E-04 0.999936805599789 3.62366E-06
        3.54665E-04 0.999935966578441 3.71551E-06
        3.56991E-04 0.999935116700382 3.80911E-06
        3.59332E-04 0.999934255600648 3.90517E-06
        3.61689E-04 0.999933383375717 4.00379E-06
        3.64061E-04 0.999932499636803 4.10423E-06
        3.66449E-04 0.999931604499952 4.20816E-06
        3.68852E-04 0.999930697550207 4.31318E-06
        3.71271E-04 0.999929778927640 4.42270E-06
        3.73706E-04 0.999928848189770 4.53252E-06
        3.76157E-04 0.999927905501174 4.64795E-06
        3.78624E-04 0.999926950389746 4.76278E-06
        3.81107E-04 0.999925982934450 4.88433E-06
        3.83607E-04 0.999925003038670 5.00509E-06
        3.86122E-04 0.999924010374320 5.13235E-06
        3.88655E-04 0.999923005040156 5.25958E-06
        3.91204E-04 0.999921986596430 5.39263E-06
        3.93769E-04 0.999920955171440 5.52665E-06
        3.96352E-04 0.999919910305890 5.66576E-06
        3.98951E-04 0.999918852163613 5.80693E-06
        4.01568E-04 0.999917780255151 5.95235E-06
        4.04201E-04 0.999916694773001 6.10106E-06
        4.06852E-04 0.999915595192292 6.25305E-06
        4.09520E-04 0.999914481724351 6.40964E-06
        4.12206E-04 0.999913353804126 6.56846E-06
        4.14910E-04 0.999912211664507 6.73333E-06
        4.17631E-04 0.999911054695841 6.89928E-06
        4.20370E-04 0.999909883200989 7.07295E-06
        4.23127E-04 0.999908696547437 7.24638E-06
        4.25902E-04 0.999907494975094 7.42920E-06
        4.28695E-04 0.999906278026495 7.61083E-06
        4.31506E-04 0.999905045644164 7.80281E-06
        4.34336E-04 0.999903797958724 7.99403E-06
        4.37185E-04 0.999902534366569 8.19462E-06
        4.40052E-04 0.999901255103894 8.39590E-06
        4.42938E-04 0.999899959550302 8.60548E-06
        4.45843E-04 0.999898647992131 8.81735E-06
        4.48767E-04 0.999897319774536 9.03633E-06
        4.51710E-04 0.999895975240416 9.25937E-06
        4.54673E-04 0.999894613694499 9.48815E-06
        4.57655E-04 0.999893235538154 9.72293E-06
        4.60656E-04 0.999891840016188 9.96185E-06
        4.63677E-04 0.999890427494362 1.02088E-05
        4.66718E-04 0.999888997142034 1.04582E-05
        4.69779E-04 0.999887549471881 1.07181E-05
        4.72860E-04 0.999886083640549 1.09785E-05
        4.75961E-04 0.999884600131669 1.12519E-05
        4.79083E-04 0.999883097959432 1.15238E-05
        4.82225E-04 0.999881577547829 1.18114E-05
        4.85387E-04 0.999880038919549 1.20971E-05
        4.88571E-04 0.999878481459058 1.23978E-05
        4.91775E-04 0.999876905571111 1.26984E-05
        4.95000E-04 0.999875310435420 1.30124E-05
        4.98247E-04 0.999873696563879 1.33286E-05
        5.01514E-04 0.999872063096886 1.36565E-05
        5.04803E-04 0.999870410636256 1.39890E-05
        5.08114E-04 0.999868738234217 1.43312E-05
        5.11446E-04 0.999867046469964 1.46807E-05
        5.14801E-04 0.999865334337655 1.50377E-05
        5.18177E-04 0.999863602552298 1.54053E-05
        5.21575E-04 0.999861850062866 1.57778E-05
        5.24996E-04 0.999860077709402 1.61643E-05
        5.28439E-04 0.999858284390023 1.65531E-05
        5.31905E-04 0.999856470928097 1.69593E-05
        5.35393E-04 0.999854636067541 1.73648E-05
        5.38905E-04 0.999852780660530 1.77917E-05
        5.42439E-04 0.999850903980075 1.82158E-05
        5.45996E-04 0.999849006163421 1.86634E-05
        5.49577E-04 0.999847087818275 1.91092E-05
        5.53182E-04 0.999845147874030 1.95762E-05
        5.56810E-04 0.999843187205944 2.00446E-05
        5.60461E-04 0.999841204707364 2.05317E-05
        5.64137E-04 0.999839201333052 2.10238E-05
        5.67837E-04 0.999837175993486 2.15319E-05
        5.71561E-04 0.999835129951222 2.20492E-05
        5.75309E-04 0.999833061956678 2.25788E-05
        5.79082E-04 0.999830973019706 2.31215E-05
        5.82880E-04 0.999828861822963 2.36735E-05
        5.86703E-04 0.999826729901251 2.42438E-05
        5.90551E-04 0.999824576012918 2.48194E-05
        5.94424E-04 0.999822401793400 2.54183E-05
        5.98322E-04 0.999820206006951 2.60183E-05
        6.02246E-04 0.999817990487424 2.66467E-05
        6.06196E-04 0.999815754370377 2.72717E-05
        6.10172E-04 0.999813498110233 2.79270E-05
        6.14173E-04 0.999811222283421 2.85781E-05
        6.18201E-04 0.999808923753524 2.92531E-05
        6.22256E-04 0.999806600164305 2.99269E-05
        6.26337E-04 0.999804252983171 3.06353E-05
        6.30444E-04 0.999801886770034 3.13499E-05
        6.34579E-04 0.999799500403274 3.20906E-05
        6.38741E-04 0.999797095772015 3.28418E-05
        6.42930E-04 0.999794671696743 3.36146E-05
        6.47147E-04 0.999792230651579 3.44044E-05
        6.51391E-04 0.999789771553928 3.52109E-05
        6.55663E-04 0.999787297294807 3.60413E-05
        6.59963E-04 0.999784806867958 3.68830E-05
        6.64291E-04 0.999782303560075 3.77559E-05
        6.68648E-04 0.999779786470624 3.86341E-05
        6.73033E-04 0.999777259412199 3.95518E-05
        6.77447E-04 0.999774721651708 4.04680E-05
        6.81890E-04 0.999772177503791 4.14328E-05
        6.86362E-04 0.999769628085874 4.23913E-05
        6.90863E-04 0.999767076817851 4.34029E-05
        6.95394E-04 0.999764529134446 4.44104E-05
        6.99955E-04 0.999761985541764 4.54619E-05
        7.04546E-04 0.999759451779064 4.65161E-05
        7.09166E-04 0.999756930141424 4.76082E-05
        7.13817E-04 0.999754428868288 4.87102E-05
        7.18499E-04 0.999751950391516 4.98381E-05
        7.23211E-04 0.999749501306360 5.09803E-05
        7.27954E-04 0.999747087469014 5.21469E-05
        7.32728E-04 0.999744722309595 5.33393E-05
        7.37534E-04 0.999742417259442 5.45518E-05
        7.42371E-04 0.999740194412310 5.58037E-05
        7.47239E-04 0.999738074843127 5.70674E-05
        7.52140E-04 0.999736093731123 5.83817E-05
        7.57073E-04 0.999734291821407 5.96986E-05
        7.62038E-04 0.999732735938186 6.10783E-05
        7.67036E-04 0.999731519028713 6.24505E-05
        7.72066E-04 0.999730803623891 6.38993E-05
        7.77130E-04 0.999730885656350 6.53386E-05
        7.82226E-04 0.999732422285550 6.68506E-05
        7.87356E-04 0.999737633964228 6.83619E-05
        7.92520E-04 0.999741623570616 5.48780E-05
        7.97718E-04 0.999736145447239 3.73083E-05
        8.02950E-04 0.999724457997916 3.04703E-05
        8.08216E-04 0.999713879176588 3.12741E-05
        8.13516E-04 0.999705758047525 3.20727E-05
        8.18851E-04 0.999698633895666 3.28660E-05
        8.24222E-04 0.999692001713169 3.36542E-05
        8.29627E-04 0.999685672153841 3.46025E-05
        8.35068E-04 0.999679615737505 3.56744E-05
        8.40545E-04 0.999673769719138 3.67393E-05
        8.46058E-04 0.999668051106793 3.77972E-05
        8.51606E-04 0.999662409411106 3.88483E-05
        8.57191E-04 0.999656807578724 3.98925E-05
        8.62813E-04 0.999651215085647 4.09299E-05
        8.68472E-04 0.999645603438511 4.19606E-05
        8.74168E-04 0.999639940971553 4.29845E-05
        8.79901E-04 0.999634181086659 4.40018E-05
        8.85671E-04 0.999628215827498 4.50203E-05
        8.91480E-04 0.999622240638569 4.66641E-05
        8.97327E-04 0.999616449510258 4.82971E-05
        9.03212E-04 0.999610732779877 4.99194E-05
        9.09135E-04 0.999605049506178 5.15312E-05
        9.15098E-04 0.999599376300635 5.31325E-05
        9.21099E-04 0.999593696957239 5.47234E-05
        9.27140E-04 0.999587998917627 5.63039E-05
        9.33221E-04 0.999582271700633 5.78741E-05
        9.39341E-04 0.999576506071240 5.94340E-05
        9.45501E-04 0.999570693535889 6.09838E-05
        9.51702E-04 0.999564825994659 6.25235E-05
        9.57944E-04 0.999558895468322 6.40532E-05
        9.64227E-04 0.999552893852627 6.55729E-05
        9.70550E-04 0.999546812664409 6.70827E-05
        9.76915E-04 0.999540642743675 6.85827E-05
        9.83322E-04 0.999534373863719 7.00728E-05
        9.89771E-04 0.999527994170981 7.15533E-05
        9.96263E-04 0.999521489308403 7.30242E-05
        1.00280E-03 0.999514840915550 7.44854E-05
        1.00937E-03 0.999508023773335 7.59371E-05
        1.01599E-03 0.999500999514006 7.73794E-05
        1.02266E-03 0.999493699154573 7.88123E-05
        1.02936E-03 0.999485945445595 8.02358E-05
        1.03611E-03 0.999477840915226 8.24404E-05
        1.04291E-03 0.999469930825414 8.55534E-05
        1.04975E-03 0.999462380436510 8.86462E-05
        1.05663E-03 0.999454993926337 9.17189E-05
        1.06356E-03 0.999447695894142 9.47715E-05
        1.07054E-03 0.999440444250579 9.78042E-05
        1.07756E-03 0.999433211031399 1.00817E-04
        1.08463E-03 0.999425975560640 1.03811E-04
        1.09174E-03 0.999418721362139 1.06784E-04
        1.09890E-03 0.999411434538581 1.09739E-04
        1.10611E-03 0.999404102821697 1.12674E-04
        1.11336E-03 0.999396714962068 1.15590E-04
        1.12066E-03 0.999389260301372 1.18487E-04
        1.12801E-03 0.999381728444020 1.21365E-04
        1.13541E-03 0.999374108978915 1.24225E-04
        1.14286E-03 0.999366391217632 1.27066E-04
        1.15035E-03 0.999358563921052 1.29888E-04
        1.15790E-03 0.999350614985495 1.32692E-04
        1.16549E-03 0.999342531051585 1.35478E-04
        1.17313E-03 0.999334296981609 1.38245E-04
        1.18083E-03 0.999325895116424 1.40995E-04
        1.18857E-03 0.999317304153141 1.43726E-04
        1.19637E-03 0.999308497335823 1.46440E-04
        1.20421E-03 0.999299439302789 1.49136E-04
        1.21211E-03 0.999290080007474 1.51815E-04
        1.22006E-03 0.999280341172318 1.54476E-04
        1.22806E-03 0.999270078157641 1.57119E-04
        1.23612E-03 0.999258906867731 1.59746E-04
        1.24422E-03 0.999247141451815 1.64191E-04
        1.25238E-03 0.999235906547690 1.70295E-04
        1.26060E-03 0.999225443208985 1.76359E-04
        1.26886E-03 0.999215374137365 1.82383E-04
        1.27719E-03 0.999205552831543 1.88369E-04
        1.28556E-03 0.999195897994399 1.94315E-04
        1.29399E-03 0.999186356358200 2.00223E-04
        1.30248E-03 0.999176889298533 2.06092E-04
        1.31102E-03 0.999167466758295 2.11923E-04
        1.31962E-03 0.999158064061637 2.17716E-04
        1.32827E-03 0.999148660063185 2.23471E-04
        1.33699E-03 0.999139235983110 2.29189E-04
        1.34575E-03 0.999129774621597 2.34869E-04
        1.35458E-03 0.999120259793770 2.40512E-04
        1.36346E-03 0.999110675895784 2.46119E-04
        1.37241E-03 0.999101007547909 2.51689E-04
        1.38141E-03 0.999091239278837 2.57223E-04
        1.39047E-03 0.999081355224948 2.62720E-04
        1.39959E-03 0.999071338822556 2.68182E-04
        1.40877E-03 0.999061172471734 2.73609E-04
        1.41800E-03 0.999050837147728 2.79000E-04
        1.42730E-03 0.999040311929647 2.84356E-04
        1.43666E-03 0.999029573404774 2.89676E-04
        1.44609E-03 0.999018594887377 2.94963E-04
        1.45557E-03 0.999007345357697 3.00215E-04
        1.46512E-03 0.998995787968238 3.05432E-04
        1.47473E-03 0.998983877856983 3.10616E-04
        1.48440E-03 0.998971558797579 3.15766E-04
        1.49413E-03 0.998958757777298 3.20882E-04
        1.50393E-03 0.998945375581453 3.25965E-04
        1.51380E-03 0.998931268817952 3.31015E-04
        1.52372E-03 0.998916210556144 3.36032E-04
        1.53372E-03 0.998899782667302 3.41016E-04
        1.54378E-03 0.998880911212020 3.45968E-04
        1.55390E-03 0.998859887363098 3.55310E-04
        1.56409E-03 0.998840386444715 3.71652E-04
        1.57435E-03 0.998823961549541 3.87888E-04
        1.58467E-03 0.998809229836643 4.04017E-04
        1.59507E-03 0.998795686992043 4.20042E-04
        1.60553E-03 0.998783067206182 4.35962E-04
        1.61606E-03 0.998771205356283 4.51779E-04
        1.62666E-03 0.998759988699671 4.67492E-04
        1.63732E-03 0.998749335402921 4.83103E-04
        1.64806E-03 0.998739183508627 4.98613E-04
        1.65887E-03 0.998729484677404 5.14021E-04
        1.66975E-03 0.998720200375438 5.29329E-04
        1.68070E-03 0.998711299423981 5.44537E-04
        1.69172E-03 0.998702756358694 5.59646E-04
        1.70282E-03 0.998694550296931 5.74657E-04
        1.71399E-03 0.998686664138426 5.89569E-04
        1.72523E-03 0.998679083993853 6.04385E-04
        1.73654E-03 0.998671798775230 6.19104E-04
        1.74793E-03 0.998664799905749 6.33727E-04
        1.75939E-03 0.998658081121435 6.48255E-04
        1.77093E-03 0.998651638346729 6.62689E-04
        1.78255E-03 0.998645469632755 6.77028E-04
        1.79424E-03 0.998639575151910 6.91274E-04
        1.80601E-03 0.998633957246338 7.05427E-04
        1.81785E-03 0.998628620531291 7.19487E-04
        1.82977E-03 0.998623572057781 7.33456E-04
        1.84177E-03 0.998618821542785 7.47335E-04
        1.85385E-03 0.998614381679879 7.61122E-04
        1.86601E-03 0.998610268549354 7.74820E-04
        1.87825E-03 0.998606502155375 7.88429E-04
        1.89057E-03 0.998603107130100 8.01949E-04
        1.90296E-03 0.998600113663206 8.15381E-04
        1.91544E-03 0.998597558743984 8.28725E-04
        1.92801E-03 0.998595487849348 8.41982E-04
        1.94065E-03 0.998593957288085 8.55153E-04
        1.95338E-03 0.998593037545757 8.68239E-04
        1.96619E-03 0.998592818220501 8.81238E-04
        1.97908E-03 0.998593415618691 8.94154E-04
        1.99206E-03 0.998594985085105 9.06985E-04
        2.00513E-03 0.998597742467206 9.19732E-04
        2.01828E-03 0.998602005218924 9.32397E-04
        2.03152E-03 0.998608282848126 9.44979E-04
        2.04484E-03 0.998617526439010 9.57479E-04
        2.05825E-03 0.998632223281386 9.69897E-04
        2.07175E-03 0.998651237824610 9.71411E-04
        2.08534E-03 0.998666440526622 9.58323E-04
        2.09901E-03 0.998674905321867 9.45321E-04
        2.11278E-03 0.998679598407913 9.32404E-04
        2.12663E-03 0.998681632393634 9.19571E-04
        2.14058E-03 0.998681618858552 9.06821E-04
        2.15462E-03 0.998679966364031 8.94154E-04
        2.16875E-03 0.998676990797219 8.81570E-04
        2.18297E-03 0.998672972991363 8.69068E-04
        2.19729E-03 0.998668203539104 8.56648E-04
        2.21170E-03 0.998663039884254 8.44308E-04
        2.22621E-03 0.998658022945244 8.32049E-04
        2.24081E-03 0.998654264642847 8.19869E-04
        2.25550E-03 0.998653651312782 8.06022E-04
        2.27030E-03 0.998650725845320 7.76942E-04
        2.28519E-03 0.998640828266549 7.48051E-04
        2.30017E-03 0.998626500339791 7.19348E-04
        2.31526E-03 0.998608572581227 6.90832E-04
        2.33044E-03 0.998587423975486 6.62502E-04
        2.34573E-03 0.998563234458461 6.34356E-04
        2.36111E-03 0.998536064790455 6.06394E-04
        2.37660E-03 0.998505883184398 5.78614E-04
        2.39218E-03 0.998472566119568 5.51015E-04
        2.40787E-03 0.998435876912680 5.23596E-04
        2.42366E-03 0.998395410035618 4.96356E-04
        2.43956E-03 0.998350456938492 4.69293E-04
        2.45556E-03 0.998299621568884 4.42406E-04
        2.47166E-03 0.998239083720048 4.15695E-04
        2.48787E-03 0.998171602653034 4.07173E-04
        2.50419E-03 0.998109092466878 4.17792E-04
        2.52061E-03 0.998054797377833 4.28342E-04
        2.53714E-03 0.998004672125547 4.38824E-04
        2.55378E-03 0.997957205658948 4.49237E-04
        2.57053E-03 0.997911593555239 4.59582E-04
        2.58739E-03 0.997867333050415 4.69860E-04
        2.60436E-03 0.997824078605643 4.80071E-04
        2.62144E-03 0.997781576957583 4.90215E-04
        2.63863E-03 0.997739633447434 5.00294E-04
        2.65594E-03 0.997698092770782 5.10306E-04
        2.67335E-03 0.997656827144659 5.20254E-04
        2.69089E-03 0.997615728608373 5.30136E-04
        2.70853E-03 0.997574703772667 5.39954E-04
        2.72630E-03 0.997533670087969 5.49708E-04
        2.74418E-03 0.997492553087970 5.59399E-04
        2.76218E-03 0.997451284273127 5.69027E-04
        2.78029E-03 0.997409799416187 5.78591E-04
        2.79852E-03 0.997368037139668 5.88094E-04
        2.81688E-03 0.997325937654061 5.97534E-04
        2.83535E-03 0.997283441565560 6.06913E-04
        2.85395E-03 0.997240488668199 6.16231E-04
        2.87266E-03 0.997197016628225 6.25488E-04
        2.89150E-03 0.997152959445668 6.34685E-04
        2.91047E-03 0.997108245531643 6.43822E-04
        2.92956E-03 0.997062795152985 6.52900E-04
        2.94877E-03 0.997016516832330 6.61918E-04
        2.96811E-03 0.996969301970772 6.70877E-04
        2.98757E-03 0.996921016286902 6.79779E-04
        3.00717E-03 0.996871485118217 6.88622E-04
        3.02689E-03 0.996820465604200 6.97407E-04
        3.04674E-03 0.996767586279335 7.06135E-04
        3.06672E-03 0.996712183551696 7.14807E-04
        3.08684E-03 0.996652607936722 7.23422E-04
        3.10708E-03 0.996588992580873 7.38331E-04
        3.12746E-03 0.996527127853996 7.64951E-04
        3.14797E-03 0.996469760067464 7.91398E-04
        3.16861E-03 0.996414612339522 8.17673E-04
        3.18939E-03 0.996360848172929 8.43776E-04
        3.21031E-03 0.996308017826338 8.69709E-04
        3.23137E-03 0.996255833321549 8.95474E-04
        3.25256E-03 0.996204089909484 9.21070E-04
        3.27389E-03 0.996152631176960 9.46500E-04
        3.29536E-03 0.996101331028196 9.71763E-04
        3.31697E-03 0.996050083321560 9.96863E-04
        3.33873E-03 0.995998795358989 1.02180E-03
        3.36062E-03 0.995947383430187 1.04657E-03
        3.38266E-03 0.995895769440165 1.07118E-03
        3.40485E-03 0.995843877984988 1.09564E-03
        3.42718E-03 0.995791633298890 1.11993E-03
        3.44966E-03 0.995738955254896 1.14406E-03
        3.47228E-03 0.995685752697799 1.16804E-03
        3.49505E-03 0.995631909210381 1.19186E-03
        3.51797E-03 0.995577242000567 1.21552E-03
        3.54105E-03 0.995521299475332 1.23903E-03
        3.56427E-03 0.995464820004251 1.26491E-03
        3.58765E-03 0.995408598446380 1.29072E-03
        3.61117E-03 0.995352214930884 1.31636E-03
        3.63486E-03 0.995295466656843 1.34183E-03
        3.65870E-03 0.995238228596873 1.36714E-03
        3.68269E-03 0.995180403739990 1.39228E-03
        3.70684E-03 0.995121907206926 1.41726E-03
        3.73115E-03 0.995062659150387 1.44208E-03
        3.75563E-03 0.995002580746680 1.46674E-03
        3.78026E-03 0.994941591405158 1.49123E-03
        3.80505E-03 0.994879606402125 1.51557E-03
        3.83000E-03 0.994816534502011 1.53974E-03
        3.85512E-03 0.994752275230773 1.56376E-03
        3.88040E-03 0.994686715441022 1.58763E-03
        3.90585E-03 0.994619724671874 1.61133E-03
        3.93147E-03 0.994551148509230 1.63489E-03
        3.95725E-03 0.994480798548198 1.65829E-03
        3.98321E-03 0.994408436280885 1.68153E-03
        4.00933E-03 0.994333745286761 1.70463E-03
        4.03562E-03 0.994256278431071 1.72757E-03
        4.06209E-03 0.994175342959239 1.75037E-03
        4.08873E-03 0.994089688925862 1.77301E-03
        4.11555E-03 0.993996184572162 1.79551E-03
        4.14254E-03 0.993895154608883 1.83005E-03
        4.16971E-03 0.993797599440010 1.88663E-03
        4.19705E-03 0.993708680518297 1.94286E-03
        4.22458E-03 0.993624100563498 1.99871E-03
        4.25229E-03 0.993542285427770 2.05420E-03
        4.28017E-03 0.993462392721611 2.10933E-03
        4.30824E-03 0.993383886265766 2.16410E-03
        4.33650E-03 0.993306387540149 2.21851E-03
        4.36494E-03 0.993229609737040 2.27257E-03
        4.39357E-03 0.993153323798225 2.32628E-03
        4.42238E-03 0.993077339012105 2.37963E-03
        4.45138E-03 0.993001491012388 2.43264E-03
        4.48058E-03 0.992925633844245 2.48531E-03
        4.50996E-03 0.992849634386272 2.53763E-03
        4.53954E-03 0.992773368172277 2.58961E-03
        4.56931E-03 0.992696716030733 2.64125E-03
        4.59928E-03 0.992619561146716 2.69255E-03
        4.62944E-03 0.992541786233386 2.74352E-03
        4.65981E-03 0.992463270508647 2.79416E-03
        4.69037E-03 0.992383886107087 2.84447E-03
        4.72113E-03 0.992303493384012 2.89445E-03
        4.75209E-03 0.992221934193030 2.94410E-03
        4.78326E-03 0.992139021400063 2.99343E-03
        4.81463E-03 0.992054520973515 3.04244E-03
        4.84620E-03 0.991968117888339 3.09113E-03
        4.87799E-03 0.991879340881347 3.13950E-03
        4.90998E-03 0.991787352722923 3.18756E-03
        4.94218E-03 0.991690011369419 3.23531E-03
        4.97459E-03 0.991588698698875 3.29243E-03
        5.00722E-03 0.991489815969178 3.35965E-03
        5.04006E-03 0.991395101697606 3.42642E-03
        5.07311E-03 0.991302282110546 3.49277E-03
        5.10638E-03 0.991210468494181 3.55868E-03
        5.13987E-03 0.991119158113856 3.62415E-03
        5.17358E-03 0.991028012852901 3.68921E-03
        5.20751E-03 0.990936780100225 3.75384E-03
        5.24166E-03 0.990845257000121 3.81805E-03
        5.27604E-03 0.990753271751498 3.88184E-03
        5.31064E-03 0.990660672754182 3.94521E-03
        5.34547E-03 0.990567321774979 4.00817E-03
        5.38053E-03 0.990473089333583 4.07072E-03
        5.41582E-03 0.990377851377711 4.13287E-03
        5.45133E-03 0.990281486726383 4.19460E-03
        5.48709E-03 0.990183874966595 4.25594E-03
        5.52307E-03 0.990084894596940 4.31688E-03
        5.55929E-03 0.989984421268269 4.37742E-03
        5.59575E-03 0.989882325997805 4.43756E-03
        5.63245E-03 0.989778473238696 4.49731E-03
        5.66939E-03 0.989672718674845 4.55668E-03
        5.70657E-03 0.989564906579120 4.61566E-03
        5.74400E-03 0.989454866514595 4.67425E-03
        5.78167E-03 0.989342409058216 4.73246E-03
        5.81959E-03 0.989227320054821 4.79029E-03
        5.85776E-03 0.989109352608231 4.84775E-03
        5.89617E-03 0.988988215463976 4.90483E-03
        5.93484E-03 0.988863555366388 4.96154E-03
        5.97377E-03 0.988734928735646 5.01788E-03
        6.01294E-03 0.988601752882892 5.07385E-03
        6.05238E-03 0.988463213672160 5.12945E-03
        6.09207E-03 0.988318065351800 5.18470E-03
        6.13203E-03 0.988164090491038 5.23958E-03
        6.17224E-03 0.987995821830408 5.29411E-03
        6.21272E-03 0.987813363991253 5.36886E-03
        6.25347E-03 0.987636035937058 5.48325E-03
        6.29448E-03 0.987473288020620 5.59689E-03
        6.33576E-03 0.987317382875588 5.70980E-03
        6.37731E-03 0.987165438030652 5.82196E-03
        6.41914E-03 0.987015858652870 5.93340E-03
        6.46124E-03 0.986867574119945 6.04411E-03
        6.50361E-03 0.986719767350464 6.15410E-03
        6.54627E-03 0.986571748353929 6.26337E-03
        6.58920E-03 0.986422879760749 6.37193E-03
        6.63241E-03 0.986272519568560 6.47978E-03
        6.67591E-03 0.986119960616234 6.58693E-03
        6.71969E-03 0.985964342876016 6.69339E-03
        6.76376E-03 0.985804486792321 6.79914E-03
        6.80812E-03 0.985638477401762 6.90421E-03
        6.85277E-03 0.985462057071265 7.00860E-03
        6.89772E-03 0.985272066829996 7.12397E-03
        6.94295E-03 0.985085604478095 7.28091E-03
        6.98849E-03 0.984914222847018 7.43682E-03
        7.03432E-03 0.984750286234044 7.59172E-03
        7.08045E-03 0.984591023582103 7.74561E-03
        7.12689E-03 0.984434930314928 7.89849E-03
        7.17363E-03 0.984281020311765 8.05038E-03
        7.22068E-03 0.984128568444428 8.20128E-03
        7.26803E-03 0.983976996376550 8.35120E-03
        7.31570E-03 0.983825812589226 8.50013E-03
        7.36368E-03 0.983674576072653 8.64810E-03
        7.41197E-03 0.983522870705809 8.79511E-03
        7.46058E-03 0.983370283301314 8.94116E-03
        7.50951E-03 0.983216379625182 9.08625E-03
        7.55876E-03 0.983060670333148 9.23040E-03
        7.60834E-03 0.982902548486230 9.37361E-03
        7.65823E-03 0.982741138471166 9.51589E-03
        7.70846E-03 0.982574728664951 9.65724E-03
        7.75901E-03 0.982401785439269 9.80157E-03
        7.80990E-03 0.982228313145030 9.96075E-03
        7.86112E-03 0.982058436605881 1.01189E-02
        7.91268E-03 0.981889027403169 1.02760E-02
        7.96457E-03 0.981718696126809 1.04321E-02
        8.01680E-03 0.981546420639995 1.05872E-02
        8.06938E-03 0.981371200891091 1.07412E-02
        8.12230E-03 0.981191815588385 1.08943E-02
        8.17557E-03 0.981006381135755 1.10464E-02
        8.22919E-03 0.980810660672408 1.11974E-02
        8.28316E-03 0.980604121351775 1.13622E-02
        8.33748E-03 0.980401339374200 1.15574E-02
        8.39216E-03 0.980209883743001 1.17513E-02
        8.44720E-03 0.980023709258805 1.19440E-02
        8.50260E-03 0.979840593159949 1.21354E-02
        8.55837E-03 0.979659387696074 1.23255E-02
        8.61450E-03 0.979479488091476 1.25145E-02
        8.67099E-03 0.979300754016126 1.27021E-02
        8.72786E-03 0.979123742111644 1.28886E-02
        8.78510E-03 0.978950707559936 1.30739E-02
        8.84272E-03 0.978791117036641 1.32579E-02
        8.90071E-03 0.978621202909826 1.33705E-02
        8.95908E-03 0.978400388536649 1.34615E-02
        9.01784E-03 0.978142356315403 1.36037E-02
        9.07698E-03 0.977881082338502 1.37830E-02
        9.13651E-03 0.977620051881954 1.39607E-02
        9.19643E-03 0.977344624428364 1.41363E-02
        9.25675E-03 0.977037431191122 1.43177E-02
        9.31746E-03 0.976732370604092 1.46020E-02
        9.37856E-03 0.976460308917621 1.48845E-02
        9.44007E-03 0.976202029611505 1.51651E-02
        9.50198E-03 0.975947271157771 1.54439E-02
        9.56430E-03 0.975694903080512 1.57390E-02
        9.62703E-03 0.975456072494129 1.60555E-02
        9.69016E-03 0.975233506887850 1.63700E-02
        9.75371E-03 0.975019836060072 1.66823E-02
        9.81768E-03 0.974804750206613 1.69927E-02
        9.88207E-03 0.974611232194846 1.73677E-02
        9.94688E-03 0.974493080980863 1.77757E-02
        1.00121E-02 0.974468061066281 1.81165E-02
        1.00778E-02 0.974420672051262 1.81987E-02
        1.01439E-02 0.974270451368992 1.82803E-02
        1.02104E-02 0.974051924629187 1.83600E-02
        1.02774E-02 0.973761170194597 1.84388E-02
        1.03448E-02 0.973392319262355 1.85650E-02
        1.04126E-02 0.973018159474849 1.88611E-02
        1.04809E-02 0.972686757644699 1.91553E-02
        1.05496E-02 0.972367245892746 1.94476E-02
        1.06188E-02 0.972046486215859 1.97380E-02
        1.06885E-02 0.971712780717031 2.00265E-02
        1.07586E-02 0.971343846240056 2.03131E-02
        1.08291E-02 0.970963302554035 2.07026E-02
        1.09001E-02 0.970617004781481 2.11352E-02
        1.09716E-02 0.970300077501294 2.15650E-02
        1.10436E-02 0.969996091020399 2.19920E-02
        1.11160E-02 0.969694633691391 2.24162E-02
        1.11889E-02 0.969383179001021 2.28377E-02
        1.12623E-02 0.969032378785420 2.32564E-02
        1.13362E-02 0.968689624822726 2.38361E-02
        1.14105E-02 0.968411924271260 2.44311E-02
        1.14853E-02 0.968177057144101 2.50222E-02
        1.15607E-02 0.967970603520934 2.56095E-02
        1.16365E-02 0.967783075745114 2.61930E-02
        1.17128E-02 0.967603034129924 2.67726E-02
        1.17896E-02 0.967402808613275 2.73485E-02
        1.18669E-02 0.967223822808077 2.80748E-02
        1.19448E-02 0.967135416877122 2.88516E-02
        1.20231E-02 0.967133948159941 2.96234E-02
        1.21020E-02 0.967207627395850 3.03901E-02
        1.21813E-02 0.967357845650312 3.11518E-02
        1.22612E-02 0.967595061314544 3.19085E-02
        1.23416E-02 0.967947519085567 3.26604E-02
        1.24226E-02 0.968432874959553 3.33287E-02
        1.25040E-02 0.968981608717877 3.37894E-02
        1.25860E-02 0.969590834172058 3.42472E-02
        1.26686E-02 0.970335405473912 3.45649E-02
        1.27517E-02 0.971047569428956 3.44092E-02
        1.28353E-02 0.971636251341009 3.42546E-02
        1.29195E-02 0.972294062089473 3.41009E-02
        1.30042E-02 0.972820211008138 3.32458E-02
        1.30895E-02 0.972990466394151 3.23920E-02
        1.31753E-02 0.972897875478561 3.15437E-02
        1.32618E-02 0.972609677478436 3.08215E-02
        1.33487E-02 0.972175608450316 3.01287E-02
        1.34363E-02 0.971555200976453 2.94404E-02
        1.35244E-02 0.970732338728608 2.88764E-02
        1.36131E-02 0.969689532060485 2.84342E-02
        1.37024E-02 0.968573181000983 2.85036E-02
        1.37922E-02 0.967492525653870 2.86742E-02
        1.38827E-02 0.966496122201421 2.92183E-02
        1.39737E-02 0.965668737458139 2.98308E-02
        1.40654E-02 0.964973972504157 3.05172E-02
        1.41576E-02 0.964419797555146 3.12531E-02
        1.42505E-02 0.964029939283811 3.20029E-02
        1.43439E-02 0.963733020931635 3.25555E-02
        1.44380E-02 0.963459211694105 3.30750E-02
        1.45327E-02 0.963179358845252 3.34659E-02
        1.46280E-02 0.962851091556219 3.38354E-02
        1.47240E-02 0.962463313350539 3.41739E-02
        1.48205E-02 0.961996487626877 3.45372E-02
        1.49177E-02 0.961398918635541 3.49142E-02
        1.50155E-02 0.960729681181175 3.56340E-02
        1.51140E-02 0.959974585769353 3.64508E-02
        1.52131E-02 0.959513144071404 3.84242E-02
        1.53129E-02 0.959763962866133 4.04882E-02
        1.54133E-02 0.961232320986373 4.32880E-02
        1.55144E-02 0.963972451560921 4.42823E-02
        1.56162E-02 0.966466078106926 4.24218E-02
        1.57186E-02 0.967240170453504 3.90530E-02
        1.58217E-02 0.966394232500272 3.69394E-02
        1.59255E-02 0.965443832957035 3.70416E-02
        1.60299E-02 0.966279444650767 3.85994E-02
        1.61350E-02 0.967361288962222 3.50565E-02
        1.62408E-02 0.965584520446874 3.02831E-02
        1.63474E-02 0.962532860855070 2.99365E-02
        1.64546E-02 0.960260196682900 3.03263E-02
        1.65625E-02 0.958454158930662 3.07484E-02
        1.66711E-02 0.956885333818463 3.12705E-02
        1.67804E-02 0.955506163598913 3.18607E-02
        1.68905E-02 0.954267559578019 3.24369E-02
        1.70013E-02 0.953118255245004 3.30077E-02
        1.71128E-02 0.952029389998162 3.35680E-02
        1.72250E-02 0.950979600043258 3.41252E-02
        1.73380E-02 0.949960298048398 3.46902E-02
        1.74517E-02 0.948963753362754 3.52516E-02
        1.75661E-02 0.947975838152641 3.58092E-02
        1.76813E-02 0.946974752586178 3.63633E-02
        1.77973E-02 0.945979035122367 3.70021E-02
        1.79140E-02 0.945021995402120 3.76658E-02
        1.80315E-02 0.944094744076713 3.83251E-02
        1.81498E-02 0.943184118715078 3.89802E-02
        1.82688E-02 0.942282524599803 3.96310E-02
        1.83886E-02 0.941383970254980 4.02775E-02
        1.85092E-02 0.940482848864737 4.09198E-02
        1.86306E-02 0.939573119445615 4.15580E-02
        1.87528E-02 0.938647193208065 4.21920E-02
        1.88758E-02 0.937693306296954 4.28218E-02
        1.89996E-02 0.936684413804834 4.34476E-02
        1.91242E-02 0.935630899349597 4.41791E-02
        1.92496E-02 0.934611661370463 4.50487E-02
        1.93758E-02 0.933652797817752 4.59125E-02
        1.95029E-02 0.932723122260028 4.67708E-02
        1.96308E-02 0.931809601340535 4.76235E-02
        1.97596E-02 0.930903979866471 4.84706E-02
        1.98892E-02 0.929999732846623 4.93122E-02
        2.00196E-02 0.929090794475775 5.01483E-02
        2.01509E-02 0.928170651384149 5.09789E-02
        2.02830E-02 0.927231172291068 5.18042E-02
        2.04161E-02 0.926260090686616 5.26240E-02
        2.05500E-02 0.925231861922755 5.34386E-02
        2.06847E-02 0.924121427620269 5.43080E-02
        2.08204E-02 0.923031840925968 5.54393E-02
        2.09569E-02 0.922037661043669 5.65633E-02
        2.10944E-02 0.921090583659465 5.76800E-02
        2.12327E-02 0.920172641062679 5.87893E-02
        2.13720E-02 0.919273626445349 5.98915E-02
        2.15122E-02 0.918386383326028 6.09865E-02
        2.16532E-02 0.917505128343877 6.20743E-02
        2.17952E-02 0.916624612651429 6.31551E-02
        2.19382E-02 0.915739514206515 6.42288E-02
        2.20821E-02 0.914843738080156 6.52955E-02
        2.22269E-02 0.913929145983185 6.63553E-02
        2.23727E-02 0.912982087912774 6.74081E-02
        2.25194E-02 0.911966746785982 6.84541E-02
        2.26671E-02 0.910940302988356 6.96951E-02
        2.28157E-02 0.909976004881973 7.09606E-02
        2.29654E-02 0.909049657431910 7.22179E-02
        2.31160E-02 0.908142857716746 7.34670E-02
        2.32676E-02 0.907246023683254 7.47080E-02
        2.34202E-02 0.906352435353913 7.59409E-02
        2.35738E-02 0.905456527790417 7.71657E-02
        2.37284E-02 0.904553115361812 7.83826E-02
        2.38840E-02 0.903636876404611 7.95915E-02
        2.40406E-02 0.902701839340454 8.07926E-02
        2.41983E-02 0.901740642657599 8.19858E-02
        2.43570E-02 0.900743115285308 8.31713E-02
        2.45168E-02 0.899692689103295 8.43490E-02
        2.46775E-02 0.898552248457541 8.55191E-02
        2.48394E-02 0.897300863706734 8.67908E-02
        2.50023E-02 0.896080196986772 8.83940E-02
        2.51663E-02 0.894979742095750 8.99868E-02
        2.53313E-02 0.893936461330436 9.15692E-02
        2.54975E-02 0.892926643780361 9.31413E-02
        2.56647E-02 0.891936725059570 9.47031E-02
        2.58330E-02 0.890957145677632 9.62547E-02
        2.60024E-02 0.889980174159093 9.77963E-02
        2.61729E-02 0.888998863374755 9.93278E-02
        2.63446E-02 0.888006392027324 1.00849E-01
        2.65174E-02 0.886995497590455 1.02361E-01
        2.66913E-02 0.885957802592693 1.03863E-01
        2.68663E-02 0.884882763781615 1.05355E-01
        2.70425E-02 0.883755623943591 1.06837E-01
        2.72199E-02 0.882552347453243 1.08310E-01
        2.73984E-02 0.881220930480023 1.09773E-01
        2.75781E-02 0.879698741368631 1.11339E-01
        2.77590E-02 0.878214011736243 1.13503E-01
        2.79410E-02 0.876941758277892 1.15653E-01
        2.81243E-02 0.875775227079241 1.17788E-01
        2.83087E-02 0.874675965255991 1.19910E-01
        2.84944E-02 0.873622988959095 1.22019E-01
        2.86812E-02 0.872602309468553 1.24113E-01
        2.88693E-02 0.871603329337811 1.26194E-01
        2.90587E-02 0.870617219289542 1.28261E-01
        2.92493E-02 0.869636024715017 1.30315E-01
        2.94411E-02 0.868652064876864 1.32355E-01
        2.96342E-02 0.867657423596057 1.34382E-01
        2.98285E-02 0.866643393760620 1.36396E-01
        3.00241E-02 0.865599714193842 1.38397E-01
        3.02211E-02 0.864513300685017 1.40384E-01
        3.04193E-02 0.863365733792881 1.42359E-01
        3.06188E-02 0.862127125359277 1.44321E-01
        3.08196E-02 0.860734550131888 1.46270E-01
        3.10217E-02 0.859084030875457 1.48308E-01
        3.12251E-02 0.857475722856335 1.51178E-01
        3.14299E-02 0.856162456139346 1.54029E-01
        3.16361E-02 0.854999628994500 1.56861E-01
        3.18435E-02 0.853936161850198 1.59675E-01
        3.20524E-02 0.852944770046304 1.62471E-01
        3.22626E-02 0.852007739653872 1.65249E-01
        3.24742E-02 0.851112093654625 1.68008E-01
        3.26872E-02 0.850247465913740 1.70749E-01
        3.29015E-02 0.849404990210273 1.73473E-01
        3.31173E-02 0.848576629871847 1.76179E-01
        3.33345E-02 0.847754708802361 1.78867E-01
        3.35531E-02 0.846931522189738 1.81537E-01
        3.37732E-02 0.846098944823700 1.84191E-01
        3.39947E-02 0.845247954508608 1.86826E-01
        3.42176E-02 0.844367947492964 1.89445E-01
        3.44420E-02 0.843445604604365 1.92047E-01
        3.46679E-02 0.842462733214511 1.94632E-01
        3.48953E-02 0.841391411646841 1.97200E-01
        3.51241E-02 0.840179941268077 1.99751E-01
        3.53545E-02 0.838685847320723 2.02285E-01
        3.55864E-02 0.837106633836299 2.05583E-01
        3.58198E-02 0.835788108443806 2.09166E-01
        3.60547E-02 0.834700075352815 2.12725E-01
        3.62911E-02 0.833747776990408 2.16261E-01
        3.65291E-02 0.832890379507934 2.19775E-01
        3.67687E-02 0.832103647655179 2.23265E-01
        3.70099E-02 0.831370757266304 2.26733E-01
        3.72526E-02 0.830678800457143 2.30178E-01
        3.74969E-02 0.830017129804361 2.33600E-01
        3.77428E-02 0.829376450113442 2.37000E-01
        3.79903E-02 0.828748257865070 2.40379E-01
        3.82395E-02 0.828124454145369 2.43735E-01
        3.84903E-02 0.827497043239013 2.47069E-01
        3.87427E-02 0.826857864618273 2.50381E-01
        3.89968E-02 0.826198319095073 2.53672E-01
        3.92526E-02 0.825509049355222 2.56942E-01
        3.95100E-02 0.824779520961892 2.60190E-01
        3.97691E-02 0.823997413463949 2.63417E-01
        4.00299E-02 0.823147645603530 2.66623E-01
        4.02925E-02 0.822210642931674 2.69808E-01
        4.05567E-02 0.821158828464210 2.72973E-01
        4.08227E-02 0.819948006774258 2.76116E-01
        4.10904E-02 0.818486994457500 2.79240E-01
        4.13599E-02 0.816629573071335 2.82489E-01
        4.16312E-02 0.814788138570741 2.86886E-01
        4.19042E-02 0.813305716042849 2.91256E-01
        4.21790E-02 0.811974010228145 2.95596E-01
        4.24556E-02 0.810712136667336 2.99909E-01
        4.27341E-02 0.809468988703798 3.04193E-01
        4.30143E-02 0.808201757084602 3.08449E-01
        4.32965E-02 0.806865824039674 3.12678E-01
        4.35804E-02 0.805404206084853 3.16879E-01
        4.38662E-02 0.803724462323087 3.21053E-01
        4.41539E-02 0.801598763740474 3.25200E-01
        4.44435E-02 0.799225664281016 3.30395E-01
        4.47350E-02 0.797202104153283 3.36387E-01
        4.50284E-02 0.795605425905875 3.42340E-01
        4.53237E-02 0.794225505736733 3.48255E-01
        4.56209E-02 0.792967284831187 3.54130E-01
        4.59201E-02 0.791764869086403 3.59968E-01
        4.62213E-02 0.790559545857677 3.65767E-01
        4.65244E-02 0.789287704487581 3.71528E-01
        4.68295E-02 0.787866917298309 3.77252E-01
        4.71367E-02 0.786166485599136 3.82939E-01
        4.74458E-02 0.783898027995265 3.88589E-01
        4.77570E-02 0.780845783705505 3.94989E-01
        4.80702E-02 0.778168058710815 4.04217E-01
        4.83854E-02 0.776648776571219 4.13386E-01
        4.87028E-02 0.775768857355788 4.22495E-01
        4.90222E-02 0.775337808050382 4.31544E-01
        4.93437E-02 0.775249007108203 4.40534E-01
        4.96673E-02 0.775427896267148 4.49466E-01
        4.99930E-02 0.775812697328367 4.58340E-01
        5.03209E-02 0.776343335336974 4.67156E-01
        5.06509E-02 0.776950607022214 4.75914E-01
        5.09831E-02 0.777537730238973 4.84616E-01
        5.13175E-02 0.777930168529984 4.93260E-01
        5.16540E-02 0.777630517638119 5.01849E-01
        5.19928E-02 0.777598225389505 5.13436E-01
        5.23338E-02 0.778827254879826 5.25004E-01
        5.26770E-02 0.780836933368730 5.36495E-01
        5.30225E-02 0.783450093121118 5.47912E-01
        5.33702E-02 0.786579343772927 5.59255E-01
        5.37202E-02 0.790173356815599 5.70523E-01
        5.40726E-02 0.794199619401159 5.81719E-01
        5.44272E-02 0.798637301598685 5.92841E-01
        5.47841E-02 0.803474023296584 6.03891E-01
        5.51434E-02 0.808704640606411 6.14868E-01
        5.55051E-02 0.814331752252428 6.25775E-01
        5.58691E-02 0.820369505006511 6.36610E-01
        5.62355E-02 0.826863290817091 6.47374E-01
        5.66043E-02 0.833769440315093 6.57846E-01
        5.69756E-02 0.840996393381921 6.68136E-01
        5.73492E-02 0.848569604101782 6.78359E-01
        5.77253E-02 0.856560845700336 6.88516E-01
        5.81039E-02 0.865052201313658 6.98606E-01
        5.84850E-02 0.874185895926081 7.08631E-01
        5.88685E-02 0.884337122550656 7.18590E-01
        5.92546E-02 0.895162004009137 7.26651E-01
        5.96432E-02 0.905617536071203 7.33195E-01
        6.00344E-02 0.915555834065936 7.39696E-01
        6.04281E-02 0.925388922388344 7.46155E-01
        6.08244E-02 0.935107895280109 7.52114E-01
        6.12233E-02 0.944603784771992 7.57966E-01
        6.16249E-02 0.953939913555394 7.63779E-01
        6.20290E-02 0.963116495698931 7.69629E-01
        6.24358E-02 0.972446817353216 7.76138E-01
        6.28453E-02 0.982210151010087 7.82606E-01
        6.32575E-02 0.992378829869784 7.89030E-01
        6.36723E-02 1.003003731632690 7.95317E-01
        6.40899E-02 1.014021371766590 8.01228E-01
        6.45102E-02 1.025484527186150 8.07100E-01
        6.49333E-02 1.037806019486870 8.12934E-01
        6.53592E-02 1.051172013423070 8.17610E-01
        6.57878E-02 1.064206718676090 8.19008E-01
        6.62193E-02 1.076067599266380 8.20397E-01
        6.66536E-02 1.087363267355280 8.21777E-01
        6.70907E-02 1.098328962175740 8.23149E-01
        6.75307E-02 1.109111944661250 8.24511E-01
        6.79736E-02 1.119842735442090 8.25864E-01
        6.84194E-02 1.130692954000180 8.27209E-01
        6.88681E-02 1.142071805434440 8.28545E-01
        6.93198E-02 1.153268263734730 8.27531E-01
        6.97744E-02 1.163531025191850 8.26460E-01
        7.02320E-02 1.173236577867490 8.25396E-01
        7.06926E-02 1.182538242708740 8.24339E-01
        7.11563E-02 1.191518827233650 8.23289E-01
        7.16229E-02 1.200235596157030 8.22246E-01
        7.20927E-02 1.208738569193360 8.21210E-01
        7.25655E-02 1.217093886404680 8.20180E-01
        7.30414E-02 1.225343751405720 8.19025E-01
        7.35204E-02 1.233317267668590 8.17442E-01
        7.40026E-02 1.240902312405150 8.15870E-01
        7.44879E-02 1.248178071312610 8.14308E-01
        7.49764E-02 1.255168507481590 8.12756E-01
        7.54681E-02 1.261878039240160 8.11214E-01
        7.59631E-02 1.268295972575580 8.09683E-01
        7.64613E-02 1.274391171153420 8.08161E-01
        7.69627E-02 1.280089121460660 8.06649E-01
        7.74675E-02 1.285152527597680 8.05147E-01
        7.79756E-02 1.290046769120290 8.05146E-01
        7.84869E-02 1.295270547109520 8.05214E-01
        7.90017E-02 1.300598935815810 8.05281E-01
        7.95198E-02 1.305929685564510 8.05348E-01
        8.00413E-02 1.311202327893120 8.05415E-01
        8.05663E-02 1.316365526584880 8.05481E-01
        8.10947E-02 1.321361780547440 8.05547E-01
        8.16265E-02 1.326108798052340 8.05612E-01
        8.21618E-02 1.330448050592380 8.05677E-01
        8.27007E-02 1.334072846256160 8.05920E-01
        8.32431E-02 1.337713756708540 8.08340E-01
        8.37890E-02 1.342010387919700 8.10744E-01
        8.43385E-02 1.346548693111480 8.13133E-01
        8.48916E-02 1.351104809309320 8.15506E-01
        8.54484E-02 1.355324730968970 8.17864E-01
        8.60088E-02 1.359679182698960 8.21935E-01
        8.65729E-02 1.364751247883850 8.26192E-01
        8.71406E-02 1.370285607478350 8.30422E-01
        8.77121E-02 1.376089245334800 8.34624E-01
        8.82874E-02 1.381958375877720 8.38799E-01
        8.88664E-02 1.387893062213510 8.43504E-01
        8.94492E-02 1.394209549212320 8.48899E-01
        9.00359E-02 1.401071094242010 8.54563E-01
        9.06264E-02 1.408458405149530 8.60471E-01
        9.12207E-02 1.416394653662910 8.66592E-01
        9.18190E-02 1.424912736149040 8.72893E-01
        9.24212E-02 1.434049004662590 8.79335E-01
        9.30273E-02 1.443841496683180 8.85875E-01
        9.36374E-02 1.454327852090490 8.92464E-01
        9.42515E-02 1.465535549326290 8.99046E-01
        9.48696E-02 1.477385147966870 9.05564E-01
        9.54918E-02 1.491734901294120 9.14477E-01
        9.61181E-02 1.506755353974000 9.15671E-01
        9.67485E-02 1.517552938053020 9.15078E-01
        9.73830E-02 1.527907416151630 9.24355E-01
        9.80216E-02 1.542819922189630 9.34858E-01
        9.86645E-02 1.559520098271880 9.40445E-01
        9.93116E-02 1.578837193467890 9.51263E-01
        9.99629E-02 1.603943567144730 9.58075E-01
        1.00618E-01 1.626569815713790 9.48725E-01
        1.01278E-01 1.643981957602580 9.46490E-01
        1.01943E-01 1.662758441425390 9.47124E-01
        1.02611E-01 1.681561439863280 9.42855E-01
        1.03284E-01 1.700341819402620 9.43116E-01
        1.03962E-01 1.723327724148210 9.44091E-01
        1.04643E-01 1.745244915099490 9.32040E-01
        1.05330E-01 1.764442963237700 9.27056E-01
        1.06020E-01 1.786205803617400 9.21302E-01
        1.06716E-01 1.806115042273200 9.06326E-01
        1.07416E-01 1.823463056106290 8.97160E-01
        1.08120E-01 1.841995085964490 8.87176E-01
        1.08829E-01 1.859507806918600 8.73020E-01
        1.09543E-01 1.874998463044090 8.60226E-01
        1.10261E-01 1.891134138265350 8.50266E-01
        1.10984E-01 1.909515774613870 8.38800E-01
        1.11712E-01 1.926084452161410 8.19368E-01
        1.12445E-01 1.941969688465970 8.06911E-01
        1.13182E-01 1.959134382538240 7.87125E-01
        1.13925E-01 1.970392233429140 7.59500E-01
        1.14672E-01 1.979218726032260 7.44299E-01
        1.15424E-01 1.988586518506850 7.21783E-01
        1.16181E-01 1.993929729291090 6.99403E-01
        1.16943E-01 1.998488227322080 6.83265E-01
        1.17710E-01 2.004520686032420 6.65460E-01
        1.18482E-01 2.008752746774100 6.43020E-01
        1.19259E-01 2.009473145907030 6.21551E-01
        1.20041E-01 2.008055763531980 6.02231E-01
        1.20828E-01 2.003709892407300 5.82112E-01
        1.21621E-01 1.997944240553760 5.69351E-01
        1.22418E-01 1.992960651965450 5.57311E-01
        1.23221E-01 1.988092906715920 5.47228E-01
        1.24029E-01 1.983709729598330 5.38769E-01
        1.24843E-01 1.980004744097510 5.31619E-01
        1.25662E-01 1.977089610195960 5.25484E-01
        1.26486E-01 1.975016674190970 5.20094E-01
        1.27315E-01 1.973790729183120 5.15205E-01
        1.28150E-01 1.973377204156500 5.10599E-01
        1.28991E-01 1.973708553216870 5.06087E-01
        1.29837E-01 1.974689377013750 5.01514E-01
        1.30688E-01 1.976199592686270 4.96756E-01
        1.31545E-01 1.978089978148050 4.91728E-01
        1.32408E-01 1.980108201134720 4.86379E-01
        1.33276E-01 1.983049729228860 4.82239E-01
        1.34150E-01 1.985856423781180 4.74311E-01
        1.35030E-01 1.987182890474780 4.67595E-01
        1.35916E-01 1.989171811780060 4.63554E-01
        1.36807E-01 1.991140752171990 4.56284E-01
        1.37704E-01 1.993077733515490 4.52621E-01
        1.38608E-01 1.995192190629280 4.46251E-01
        1.39517E-01 1.997403325844280 4.43327E-01
        1.40432E-01 2.000750046716840 4.39517E-01
        1.41353E-01 2.005493422357300 4.37451E-01
        1.42280E-01 2.012785944125960 4.34299E-01
        1.43213E-01 2.018837163113950 4.23834E-01
        1.44152E-01 2.024410979597790 4.20293E-01
        1.45097E-01 2.031281002101390 4.11467E-01
        1.46049E-01 2.035569342772470 4.01021E-01
        1.47007E-01 2.044578389121240 4.02444E-01
        1.47971E-01 2.048548678911720 3.74117E-01
        1.48941E-01 2.051860333749280 3.82395E-01
        1.49918E-01 2.058636294818030 3.60816E-01
        1.50901E-01 2.061154246507140 3.56425E-01
        1.51891E-01 2.068144657510150 3.48080E-01
        1.52887E-01 2.073540614291950 3.32252E-01
        1.53890E-01 2.077530782025540 3.21890E-01
        1.54899E-01 2.080742551062860 3.06085E-01
        1.55915E-01 2.082861021097260 2.94952E-01
        1.56938E-01 2.084912847050880 2.80703E-01
        1.57967E-01 2.086721704040110 2.69013E-01
        1.59003E-01 2.088009659098440 2.53579E-01
        1.60046E-01 2.088020234533340 2.40139E-01
        1.61095E-01 2.087470194788690 2.25770E-01
        1.62152E-01 2.086648638130660 2.12829E-01
        1.63215E-01 2.085166091469090 1.97553E-01
        1.64286E-01 2.082480196193530 1.83593E-01
        1.65363E-01 2.079353709483800 1.69672E-01
        1.66448E-01 2.075512956469750 1.55357E-01
        1.67539E-01 2.069934471283990 1.40084E-01
        1.68638E-01 2.063036406522280 1.27790E-01
        1.69744E-01 2.056778432393160 1.17511E-01
        1.70857E-01 2.050840022111520 1.05735E-01
        1.71978E-01 2.044139304277000 9.39894E-02
        1.73106E-01 2.037018695898530 8.30588E-02
        1.74241E-01 2.029580913972970 7.16937E-02
        1.75384E-01 2.020024144199120 5.83285E-02
        1.76534E-01 2.008417084643530 4.91961E-02
        1.77692E-01 1.998256968930740 4.47218E-02
        1.78857E-01 1.989743229803350 3.79142E-02
        1.80030E-01 1.980769670621590 3.03324E-02
        1.81211E-01 1.970758067139810 2.28610E-02
        1.82399E-01 1.959900218764460 1.69110E-02
        1.83595E-01 1.948938727178850 1.27254E-02
        1.84800E-01 1.938122271904700 9.51847E-03
        1.86012E-01 1.927930647322120 8.36834E-03
        1.87231E-01 1.918913995898000 7.85672E-03
        1.88459E-01 1.910800387702830 7.34843E-03
        1.89695E-01 1.903263088409650 6.84346E-03
        1.90939E-01 1.896209094216210 6.53579E-03
        1.92192E-01 1.889628230016400 6.29305E-03
        1.93452E-01 1.883440841210070 6.05188E-03
        1.94721E-01 1.877562574712630 5.81229E-03
        1.95998E-01 1.871975374150690 5.67224E-03
        1.97283E-01 1.866685490502170 5.56050E-03
        1.98577E-01 1.861658893189120 5.44949E-03
        1.99880E-01 1.856863830021620 5.33920E-03
        2.01190E-01 1.852278010686060 5.22963E-03
        2.02510E-01 1.847884400660670 5.12077E-03
        2.03838E-01 1.843671519190680 5.01263E-03
        2.05175E-01 1.839624304704750 4.88712E-03
        2.06520E-01 1.835713957342080 4.73241E-03
        2.07875E-01 1.831924135187980 4.58582E-03
        2.09238E-01 1.828254428476760 4.44675E-03
        2.10611E-01 1.824700301184820 4.31468E-03
        2.11992E-01 1.821256535114200 4.18915E-03
        2.13382E-01 1.817917906421860 4.06967E-03
        2.14782E-01 1.814679397669680 3.95587E-03
        2.16190E-01 1.811536272315940 3.84737E-03
        2.17608E-01 1.808484116602540 3.74390E-03
        2.19035E-01 1.805518800099950 3.64508E-03
        2.20472E-01 1.802636424869360 3.55061E-03
        2.21918E-01 1.799833346538490 3.46023E-03
        2.23373E-01 1.797106168128820 3.37370E-03
        2.24838E-01 1.794451692043720 3.29076E-03
        2.26313E-01 1.791866912584770 3.21124E-03
        2.27797E-01 1.789349031167340 3.13494E-03
        2.29291E-01 1.786895395170280 3.06165E-03
        2.30794E-01 1.784503512387830 2.99125E-03
        2.32308E-01 1.782171041716970 2.92355E-03
        2.33832E-01 1.779895751409420 2.85841E-03
        2.35365E-01 1.777675546503390 2.79571E-03
        2.36909E-01 1.775508447411830 2.73532E-03
        2.38463E-01 1.773392584090820 2.67715E-03
        2.40026E-01 1.771326180641490 2.62104E-03
        2.41601E-01 1.769307528902020 2.56689E-03
        2.43185E-01 1.767335018369750 2.51462E-03
        2.44780E-01 1.765407119717660 2.46413E-03
        2.46385E-01 1.763522373190320 2.41534E-03
        2.48001E-01 1.761679388772600 2.36816E-03
        2.49628E-01 1.759876843770140 2.32254E-03
        2.51265E-01 1.758113476023730 2.27838E-03
        2.52913E-01 1.756388066138640 2.23561E-03
        2.54572E-01 1.754699458940170 2.19420E-03
        2.56241E-01 1.753046550110710 2.15407E-03
        2.57922E-01 1.751428285719610 2.11519E-03
        2.59613E-01 1.749843658360550 2.07748E-03
        2.61316E-01 1.748291698101410 2.04091E-03
        2.63030E-01 1.746771465783350 2.00539E-03
        2.64755E-01 1.745282059929490 1.97091E-03
        2.66491E-01 1.743822623028640 1.93742E-03
        2.68239E-01 1.742392332019180 1.90489E-03
        2.69998E-01 1.740990390648060 1.87326E-03
        2.71769E-01 1.739616027009630 1.84250E-03
        2.73551E-01 1.738268511013660 1.81260E-03
        2.75345E-01 1.736947131578450 1.78349E-03
        2.77151E-01 1.735651203856590 1.75517E-03
        2.78969E-01 1.734380068426360 1.72758E-03
        2.80798E-01 1.733133092677750 1.70074E-03
        2.82640E-01 1.731909666891050 1.67458E-03
        2.84493E-01 1.730709198434790 1.64910E-03
        2.86359E-01 1.729531114153320 1.62425E-03
        2.88237E-01 1.728374858239170 1.60003E-03
        2.90128E-01 1.727239899755170 1.57640E-03
        2.92030E-01 1.726125720592280 1.55335E-03
        2.93946E-01 1.725031821829120 1.53086E-03
        2.95873E-01 1.723957719669300 1.50890E-03
        2.97814E-01 1.722902945922630 1.48747E-03
        2.99767E-01 1.721867049675810 1.46654E-03
        3.01733E-01 1.720849587445560 1.44608E-03
        3.03712E-01 1.719850135167680 1.42611E-03
        3.05704E-01 1.718868284064830 1.40658E-03
        3.07709E-01 1.717903632625780 1.38750E-03
        3.09727E-01 1.716955793749800 1.36884E-03
        3.11758E-01 1.716024389120010 1.35059E-03
        3.13803E-01 1.715109053513230 1.33274E-03
        3.15861E-01 1.714209433319910 1.31527E-03
        3.17932E-01 1.713325182894300 1.29818E-03
        3.20017E-01 1.712455968860860 1.28146E-03
        3.22116E-01 1.711601465566790 1.26507E-03
        3.24229E-01 1.710761352742320 1.24903E-03
        3.26355E-01 1.709935327379190 1.23333E-03
        3.28495E-01 1.709123090770870 1.21794E-03
        3.30650E-01 1.708324350265790 1.20286E-03
        3.32818E-01 1.707538825977140 1.18809E-03
        3.35001E-01 1.706766238420200 1.17361E-03
        3.37198E-01 1.706006323382120 1.15942E-03
        3.39409E-01 1.705258818558810 1.14549E-03
        3.41635E-01 1.704523470872790 1.13185E-03
        3.43876E-01 1.703800031968210 1.11845E-03
        3.46131E-01 1.703088257451100 1.10532E-03
        3.48401E-01 1.702387914743800 1.09243E-03
        3.50686E-01 1.701698777468650 1.07979E-03
        3.52986E-01 1.701020619190820 1.06736E-03
        3.55301E-01 1.700353221007580 1.05518E-03
        3.57631E-01 1.699696372187190 1.04321E-03
        3.59977E-01 1.699049862042130 1.03146E-03
        3.62338E-01 1.698413495478130 1.01993E-03
        3.64714E-01 1.697787072466140 1.00859E-03
        3.67106E-01 1.697170397800570 9.97459E-04
        3.69514E-01 1.696563285177680 9.86516E-04
        3.71937E-01 1.695965550575650 9.75766E-04
        3.74376E-01 1.695377013615910 9.65195E-04
        3.76832E-01 1.694797500229830 9.54811E-04
        3.79303E-01 1.694226838487760 9.44595E-04
        3.81791E-01 1.693664861239440 9.34557E-04
        3.84294E-01 1.693111406771190 9.24681E-04
        3.86815E-01 1.692566312001470 9.14967E-04
        3.89352E-01 1.692029421440270 9.05414E-04
        3.91905E-01 1.691500582558230 8.96016E-04
        3.94475E-01 1.690979647757160 8.86774E-04
        3.97063E-01 1.690466471188730 8.77676E-04
        3.99667E-01 1.689960908273480 8.68723E-04
        4.02288E-01 1.689462819319340 8.59911E-04
        4.04926E-01 1.688972066504030 8.51235E-04
        4.07582E-01 1.688488517201520 8.42698E-04
        4.10255E-01 1.688012040916830 8.34290E-04
        4.12945E-01 1.687542507851010 8.26011E-04
        4.15654E-01 1.687079792725150 8.17858E-04
        4.18380E-01 1.686623772578330 8.09828E-04
        4.21124E-01 1.686174325289280 8.01916E-04
        4.23885E-01 1.685731335036590 7.94128E-04
        4.26665E-01 1.685294686433070 7.86451E-04
        4.29464E-01 1.684864265433170 7.78890E-04
        4.32280E-01 1.684439960821560 7.71435E-04
        4.35115E-01 1.684021661936130 7.64089E-04
        4.37969E-01 1.683609264441710 7.56853E-04
        4.40841E-01 1.683202664196100 7.49718E-04
        4.43732E-01 1.682801757680340 7.42684E-04
        4.46643E-01 1.682406443823460 7.35748E-04
        4.49572E-01 1.682016624714060 7.28912E-04
        4.52520E-01 1.681632203256710 7.22168E-04
        4.55488E-01 1.681253083331170 7.15518E-04
        4.58475E-01 1.680879172817860 7.08960E-04
        4.61482E-01 1.680510380554300 7.02493E-04
        4.64509E-01 1.680146617085320 6.96114E-04
        4.67555E-01 1.679787794322470 6.89822E-04
        4.70622E-01 1.679433827684540 6.83618E-04
        4.73708E-01 1.679084631486560 6.77491E-04
        4.76815E-01 1.678740120489580 6.71447E-04
        4.79942E-01 1.678400214883870 6.65484E-04
        4.83090E-01 1.678064834512480 6.59599E-04
        4.86258E-01 1.677733899418650 6.53789E-04
        4.89447E-01 1.677407332564240 6.48057E-04
        4.92657E-01 1.677085058206570 6.42397E-04
        4.95888E-01 1.676767000854060 6.36810E-04
        4.99140E-01 1.676453088400170 6.31297E-04
        5.02414E-01 1.676143247611980 6.25850E-04
        5.05709E-01 1.675837408177140 6.20478E-04
        5.09025E-01 1.675535502386100 6.15171E-04
        5.12364E-01 1.675237459333580 6.09929E-04
        5.15724E-01 1.674943211969320 6.04754E-04
        5.19106E-01 1.674652694417200 5.99641E-04
        5.22511E-01 1.674365841605770 5.94594E-04
        5.25937E-01 1.674082589344280 5.89606E-04
        5.29387E-01 1.673802873848760 5.84680E-04
        5.32859E-01 1.673526633847180 5.79814E-04
        5.36353E-01 1.673253809419580 5.75010E-04
        5.39871E-01 1.672984340807800 5.70262E-04
        5.43412E-01 1.672718167645240 5.65571E-04
        5.46975E-01 1.672455232475930 5.60936E-04
        5.50563E-01 1.672195478006170 5.56356E-04
        5.54173E-01 1.671938847866080 5.51831E-04
        5.57808E-01 1.671685286913740 5.47358E-04
        5.61466E-01 1.671434740037630 5.42939E-04
        5.65149E-01 1.671187154088710 5.38572E-04
        5.68855E-01 1.670942476280780 5.34255E-04
        5.72586E-01 1.670700655058000 5.29990E-04
        5.76341E-01 1.670461638025970 5.25772E-04
        5.80121E-01 1.670225374393070 5.21605E-04
        5.83925E-01 1.669991816500650 5.17487E-04
        5.87755E-01 1.669760913513910 5.13412E-04
        5.91610E-01 1.669532616628060 5.09387E-04
        5.95490E-01 1.669306879918460 5.05408E-04
        5.99395E-01 1.669083655151130 5.01473E-04
        6.03326E-01 1.668862896881350 4.97585E-04
        6.07283E-01 1.668644558885250 4.93737E-04
        6.11266E-01 1.668428596201270 4.89937E-04
        6.15275E-01 1.668214964732020 4.86176E-04
        6.19310E-01 1.668003619220440 4.82459E-04
        6.23372E-01 1.667794518835190 4.78786E-04
        6.27460E-01 1.667587620705700 4.75151E-04
        6.31575E-01 1.667382880759020 4.71557E-04
        6.35717E-01 1.667180259272460 4.68005E-04
        6.39886E-01 1.666979714626300 4.64489E-04
        6.44083E-01 1.666781205358960 4.61014E-04
        6.48307E-01 1.666584693698670 4.57579E-04
        6.52559E-01 1.666390139073440 4.54179E-04
        6.56839E-01 1.666197501875520 4.50819E-04
        6.61146E-01 1.666006745416160 4.47497E-04
        6.65482E-01 1.665817831150440 4.44209E-04
        6.69847E-01 1.665630720837970 4.40959E-04
        6.74240E-01 1.665445377921640 4.37744E-04
        6.78662E-01 1.665261764922580 4.34563E-04
        6.83113E-01 1.665079847061790 4.31421E-04
        6.87593E-01 1.664899588298690 4.28309E-04
        6.92102E-01 1.664720952432800 4.25235E-04
        6.96641E-01 1.664543905870760 4.22194E-04
        7.01210E-01 1.664368412796650 4.19184E-04
        7.05809E-01 1.664194439019920 4.16209E-04
        7.10438E-01 1.664021951500610 4.13267E-04
        7.15097E-01 1.663850916654010 4.10357E-04
        7.19787E-01 1.663681300931620 4.07478E-04
        7.24508E-01 1.663513071620200 4.04632E-04
        7.29259E-01 1.663346196594410 4.01817E-04
        7.34042E-01 1.663180643588800 3.99033E-04
        7.38856E-01 1.663016381439830 3.96281E-04
        7.43702E-01 1.662853377379420 3.93557E-04
        7.48579E-01 1.662691600949860 3.90866E-04
        7.53489E-01 1.662531021879240 3.88203E-04
        7.58430E-01 1.662371608482710 3.85571E-04
        7.63404E-01 1.662213330913700 3.82967E-04
        7.68411E-01 1.662056159081970 3.80394E-04
        7.73451E-01 1.661900063742700 3.77850E-04
        7.78523E-01 1.661745015360890 3.75334E-04
        7.83629E-01 1.661590984028900 3.72846E-04
        7.88768E-01 1.661437941404980 3.70388E-04
        7.93941E-01 1.661285858115050 3.67955E-04
        7.99148E-01 1.661134705146020 3.65552E-04
        8.04389E-01 1.660984455566410 3.63176E-04
        8.09665E-01 1.660835079763770 3.60826E-04
        8.14975E-01 1.660686549839490 3.58506E-04
        8.20320E-01 1.660538839484550 3.56212E-04
        8.25700E-01 1.660391921431160 3.53947E-04
        8.31115E-01 1.660245767546910 3.51705E-04
        8.36566E-01 1.660100349459510 3.49490E-04
        8.42052E-01 1.659955640872910 3.47303E-04
        8.47575E-01 1.659811615835490 3.45142E-04
        8.53133E-01 1.659668247766530 3.43007E-04
        8.58729E-01 1.659525508908830 3.40897E-04
        8.64360E-01 1.659383373345400 3.38815E-04
        8.70029E-01 1.659241816079400 3.36758E-04
        8.75735E-01 1.659100809932500 3.34725E-04
        8.81478E-01 1.658960328738140 3.32718E-04
        8.87260E-01 1.658820347735060 3.30738E-04
        8.93078E-01 1.658680840149400 3.28780E-04
        8.98936E-01 1.658541781242120 3.26852E-04
        9.04831E-01 1.658403145860850 3.24945E-04
        9.10765E-01 1.658264907691900 3.23065E-04
        9.16738E-01 1.658127041814790 3.21208E-04
        9.22751E-01 1.657989522930500 3.19378E-04
        9.28802E-01 1.657852326479550 3.17572E-04
        9.34894E-01 1.657715427288720 3.15790E-04
        9.41025E-01 1.657578799898410 3.14032E-04
        9.47197E-01 1.657442420401220 3.12301E-04
        9.53409E-01 1.657306263466280 3.10592E-04
        9.59662E-01 1.657170303905250 3.08909E-04
        9.65955E-01 1.657034518409690 3.07251E-04
        9.72291E-01 1.656898880994120 3.05615E-04
        9.78667E-01 1.656763367837410 3.04007E-04
        9.85086E-01 1.656627954501450 3.02420E-04
        9.91546E-01 1.656492615662760 3.00860E-04
        9.98049E-01 1.656357328545610 2.99325E-04
        1.00459E+00 1.656222067927810 2.97812E-04
        1.01118E+00 1.656086808784410 2.96324E-04
        1.01781E+00 1.655951526905290 2.94861E-04
        1.02449E+00 1.655816198397420 2.93423E-04
        1.03121E+00 1.655680798654670 2.92008E-04
        1.03797E+00 1.655545303216430 2.90619E-04
        1.04478E+00 1.655409688197330 2.89253E-04
        1.05163E+00 1.655273928206780 2.87912E-04
        1.05853E+00 1.655137999027460 2.86596E-04
        1.06547E+00 1.655001876983780 2.85305E-04
        1.07246E+00 1.654865537417520 2.84039E-04
        1.07949E+00 1.654728955313580 2.82797E-04
        1.08657E+00 1.654592106762230 2.81581E-04
        1.09370E+00 1.654454967103450 2.80389E-04
        1.10087E+00 1.654317511391850 2.79223E-04
        1.10809E+00 1.654179714943220 2.78081E-04
        1.11536E+00 1.654041553189150 2.76966E-04
        1.12267E+00 1.653903001371670 2.75875E-04
        1.13004E+00 1.653764034496120 2.74810E-04
        1.13745E+00 1.653624628174540 2.73771E-04
        1.14491E+00 1.653484757009870 2.72757E-04
        1.15242E+00 1.653344395305500 2.71768E-04
        1.15997E+00 1.653203518463140 2.70807E-04
        1.16758E+00 1.653062101504660 2.69872E-04
        1.17524E+00 1.652920118827420 2.68963E-04
        1.18295E+00 1.652777545255740 2.68081E-04
        1.19070E+00 1.652634354912390 2.67225E-04
        1.19851E+00 1.652490522069840 2.66397E-04
        1.20637E+00 1.652346021025920 2.65595E-04
        1.21428E+00 1.652200825557210 2.64820E-04
        1.22225E+00 1.652054909971190 2.64074E-04
        1.23026E+00 1.651908248343390 2.63354E-04
        1.23833E+00 1.651760813803290 2.62662E-04
        1.24645E+00 1.651612579684000 2.61999E-04
        1.25463E+00 1.651463519634520 2.61364E-04
        1.26286E+00 1.651313606950730 2.60758E-04
        1.27114E+00 1.651162815080970 2.60182E-04
        1.27948E+00 1.651011116973750 2.59634E-04
        1.28787E+00 1.650858484804320 2.59115E-04
        1.29631E+00 1.650704890912210 2.58626E-04
        1.30482E+00 1.650550308163940 2.58167E-04
        1.31337E+00 1.650394708803480 2.57738E-04
        1.32199E+00 1.650238064373330 2.57340E-04
        1.33066E+00 1.650080346727190 2.56973E-04
        1.33938E+00 1.649921527467220 2.56636E-04
        1.34817E+00 1.649761578047030 2.56332E-04
        1.35701E+00 1.649600469621200 2.56060E-04
        1.36591E+00 1.649438173073830 2.55820E-04
        1.37487E+00 1.649274658609990 2.55611E-04
        1.38388E+00 1.649109897149520 2.55438E-04
        1.39296E+00 1.648943859290800 2.55297E-04
        1.40210E+00 1.648776514318780 2.55189E-04
        1.41129E+00 1.648607832035890 2.55117E-04
        1.42055E+00 1.648437782244820 2.55079E-04
        1.42986E+00 1.648266334105500 2.55076E-04
        1.43924E+00 1.648093455975720 2.55108E-04
        1.44868E+00 1.647919116426600 2.55176E-04
        1.45818E+00 1.647743284088190 2.55281E-04
        1.46774E+00 1.647565926619540 2.55422E-04
        1.47737E+00 1.647387011926700 2.55601E-04
        1.48706E+00 1.647206507619320 2.55819E-04
        1.49681E+00 1.647024380656050 2.56075E-04
        1.50663E+00 1.646840597872660 2.56370E-04
        1.51651E+00 1.646655125764740 2.56705E-04
        1.52646E+00 1.646467930568850 2.57079E-04
        1.53647E+00 1.646278977438460 2.57494E-04
        1.54654E+00 1.646088232192800 2.57952E-04
        1.55669E+00 1.645895659803280 2.58450E-04
        1.56690E+00 1.645701224613360 2.58991E-04
        1.57717E+00 1.645504891106180 2.59575E-04
        1.58752E+00 1.645306622952230 2.60203E-04
        1.59793E+00 1.645106384261260 2.60876E-04
        1.60841E+00 1.644904137576310 2.61593E-04
        1.61895E+00 1.644699844977220 2.62356E-04
        1.62957E+00 1.644493469784060 2.63168E-04
        1.64026E+00 1.644284974346030 2.64027E-04
        1.65102E+00 1.644074319511520 2.64933E-04
        1.66185E+00 1.643861466161190 2.65889E-04
        1.67274E+00 1.643646374655020 2.66894E-04
        1.68371E+00 1.643429005003590 2.67949E-04
        1.69476E+00 1.643209316820370 2.69055E-04
        1.70587E+00 1.642987269295880 2.70215E-04
        1.71706E+00 1.642762820835290 2.71426E-04
        1.72832E+00 1.642535929713380 2.72693E-04
        1.73966E+00 1.642306553406640 2.74013E-04
        1.75106E+00 1.642074648826500 2.75390E-04
        1.76255E+00 1.641840173033570 2.76824E-04
        1.77411E+00 1.641603081702940 2.78317E-04
        1.78574E+00 1.641363330917230 2.79869E-04
        1.79746E+00 1.641120875440150 2.81479E-04
        1.80924E+00 1.640875669096710 2.83151E-04
        1.82111E+00 1.640627666017820 2.84885E-04
        1.83305E+00 1.640376819086600 2.86681E-04
        1.84507E+00 1.640123080800070 2.88543E-04
        1.85718E+00 1.639866403079060 2.90469E-04
        1.86936E+00 1.639606737213500 2.92462E-04
        1.88162E+00 1.639344034019650 2.94523E-04
        1.89396E+00 1.639078242914140 2.96652E-04
        1.90638E+00 1.638809313641370 2.98853E-04
        1.91888E+00 1.638537195224260 3.01125E-04
        1.93146E+00 1.638261835073460 3.03470E-04
        1.94413E+00 1.637983180756780 3.05891E-04
        1.95688E+00 1.637701179457030 3.08388E-04
        1.96972E+00 1.637415776642650 3.10961E-04
        1.98263E+00 1.637126916919390 3.13612E-04
        1.99564E+00 1.636834544676560 3.16344E-04
        2.00872E+00 1.636538603584240 3.19158E-04
        2.02190E+00 1.636239036054990 3.22054E-04
        2.03516E+00 1.635935783958660 3.25035E-04
        2.04851E+00 1.635628788600290 3.28103E-04
        2.06194E+00 1.635317989678830 3.31258E-04
        2.07546E+00 1.635003326615740 3.34505E-04
        2.08908E+00 1.634684738777180 3.37844E-04
        2.10278E+00 1.634362164427700 3.41278E-04
        2.11657E+00 1.634035540056760 3.44806E-04
        2.13045E+00 1.633704800879940 3.48431E-04
        2.14442E+00 1.633369882076040 3.52156E-04
        2.15848E+00 1.633030717492440 3.55982E-04
        2.17264E+00 1.632687239921290 3.59910E-04
        2.18689E+00 1.632339381484740 3.63944E-04
        2.20123E+00 1.631987072728630 3.68085E-04
        2.21567E+00 1.631630243883270 3.72336E-04
        2.23020E+00 1.631268823152740 3.76697E-04
        2.24483E+00 1.630902737655450 3.81173E-04
        2.25955E+00 1.630531916133790 3.85770E-04
        2.27437E+00 1.630156284512390 3.90483E-04
        2.28928E+00 1.629775766422090 3.95319E-04
        2.30430E+00 1.629390285117470 4.00277E-04
        2.31941E+00 1.628999762908800 4.05363E-04
        2.33462E+00 1.628604121045750 4.10578E-04
        2.34993E+00 1.628203278510420 4.15923E-04
        2.36534E+00 1.627797153563440 4.21403E-04
        2.38086E+00 1.627385663466820 4.27021E-04
        2.39647E+00 1.626968723907660 4.32778E-04
        2.41219E+00 1.626546250030680 4.38679E-04
        2.42801E+00 1.626118153620630 4.44723E-04
        2.44393E+00 1.625684345734020 4.50919E-04
        2.45996E+00 1.625244738971680 4.57270E-04
        2.47609E+00 1.624799242387070 4.63777E-04
        2.49233E+00 1.624347763842330 4.70444E-04
        2.50868E+00 1.623890208419910 4.77271E-04
        2.52513E+00 1.623426480256970 4.84266E-04
        2.54169E+00 1.622956483087800 4.91430E-04
        2.55836E+00 1.622480116982820 4.98766E-04
        2.57514E+00 1.621997281854910 5.06279E-04
        2.59203E+00 1.621507875936750 5.13973E-04
        2.60903E+00 1.621011794261530 5.21850E-04
        2.62614E+00 1.620508932107950 5.29919E-04
        2.64336E+00 1.619999182559110 5.38178E-04
        2.66070E+00 1.619482434082380 5.46634E-04
        2.67815E+00 1.618958577626460 5.55297E-04
        2.69571E+00 1.618427502745820 5.64165E-04
        2.71339E+00 1.617889092970880 5.73243E-04
        2.73119E+00 1.617343231963070 5.82539E-04
        2.74910E+00 1.616789801288220 5.92053E-04
        2.76713E+00 1.616228679655680 6.01793E-04
        2.78528E+00 1.615659744183690 6.11761E-04
        2.80354E+00 1.615082868642660 6.21964E-04
        2.82193E+00 1.614497926978740 6.32410E-04
        2.84044E+00 1.613904789677500 6.43098E-04
        2.85907E+00 1.613303323059530 6.54038E-04
        2.87782E+00 1.612693394078290 6.65237E-04
        2.89669E+00 1.612074864587480 6.76696E-04
        2.91569E+00 1.611447598253700 6.88434E-04
        2.93481E+00 1.610811455156570 7.00443E-04
        2.95406E+00 1.610166290215600 7.12738E-04
        2.97343E+00 1.609511957695170 7.25318E-04
        2.99293E+00 1.608848305969160 7.38191E-04
        3.01256E+00 1.608175182971130 7.51367E-04
        3.03232E+00 1.607492434854940 7.64852E-04
        3.05220E+00 1.606799902541210 7.78649E-04
        3.07222E+00 1.606097425638490 7.92774E-04
        3.09237E+00 1.605384840749490 8.07225E-04
        3.11265E+00 1.604661979173880 8.22015E-04
        3.13307E+00 1.603928670707060 8.37150E-04
        3.15361E+00 1.603184739422790 8.52639E-04
        3.17430E+00 1.602430014046990 8.68505E-04
        3.19511E+00 1.601664317322850 8.84736E-04
        3.21607E+00 1.600887461472730 9.01349E-04
        3.23716E+00 1.600099259188790 9.18349E-04
        3.25839E+00 1.599299518349760 9.35748E-04
        3.27976E+00 1.598488048729860 9.53564E-04
        3.30127E+00 1.597664652061640 9.71789E-04
        3.32292E+00 1.596829117713940 9.90435E-04
        3.34471E+00 1.595981241658740 1.00953E-03
        3.36665E+00 1.595120814656280 1.02907E-03
        3.38873E+00 1.594247618907860 1.04906E-03
        3.41095E+00 1.593361433713850 1.06953E-03
        3.43332E+00 1.592462039235180 1.09050E-03
        3.45584E+00 1.591549207292190 1.11195E-03
        3.47851E+00 1.590622700870930 1.13391E-03
        3.50132E+00 1.589682287059620 1.15640E-03
        3.52428E+00 1.588727719441980 1.17942E-03
        3.54740E+00 1.587758748298690 1.20298E-03
        3.57066E+00 1.586775118170840 1.22710E-03
        3.59408E+00 1.585776564427690 1.25179E-03
        3.61765E+00 1.584762824702820 1.27707E-03
        3.64138E+00 1.583733627950100 1.30295E-03
        3.66526E+00 1.582688696045190 1.32945E-03
        3.68930E+00 1.581627739921300 1.35657E-03
        3.71349E+00 1.580550464121130 1.38435E-03
        3.73785E+00 1.579456582170650 1.41281E-03
        3.76236E+00 1.578345789489410 1.44194E-03
        3.78703E+00 1.577217768159100 1.47178E-03
        3.81187E+00 1.576072198267320 1.50234E-03
        3.83687E+00 1.574908758591960 1.53364E-03
        3.86203E+00 1.573727113655710 1.56569E-03
        3.88736E+00 1.572526910350290 1.59851E-03
        3.91286E+00 1.571307794544780 1.63213E-03
        3.93852E+00 1.570069403518630 1.66656E-03
        3.96435E+00 1.568811367170110 1.70184E-03
        3.99035E+00 1.567533304610230 1.73798E-03
        4.01652E+00 1.566234820008070 1.77499E-03
        4.04286E+00 1.564915495713100 1.81290E-03
        4.06938E+00 1.563574919350590 1.85177E-03
        4.09606E+00 1.562212679600240 1.89162E-03
        4.12293E+00 1.560828326382500 1.93242E-03
        4.14997E+00 1.559421398179880 1.97425E-03
        4.17718E+00 1.557991413848850 2.01709E-03
        4.20458E+00 1.556537876199770 2.06100E-03
        4.23215E+00 1.555060283581000 2.10601E-03
        4.25991E+00 1.553558093892790 2.15213E-03
        4.28785E+00 1.552030758216780 2.19942E-03
        4.31597E+00 1.550477714051430 2.24787E-03
        4.34428E+00 1.548898404711550 2.29755E-03
        4.37277E+00 1.547292461421630 2.34849E-03
        4.40144E+00 1.545660813913170 2.40071E-03
        4.43031E+00 1.543990465334140 2.43292E-03
        4.45937E+00 1.542284639224620 2.50106E-03
        4.48861E+00 1.540557235658770 2.57156E-03
        4.51805E+00 1.538803555651970 2.64452E-03
        4.54768E+00 1.537021856026510 2.72005E-03
        4.57751E+00 1.535211026256770 2.79825E-03
        4.60753E+00 1.533370173358620 2.87923E-03
        4.63775E+00 1.531498495279180 2.96309E-03
        4.66816E+00 1.529595228778020 3.04997E-03
        4.69878E+00 1.527659625294710 3.13999E-03
        4.72959E+00 1.525690938686310 3.23327E-03
        4.76061E+00 1.523688410676410 3.32995E-03
        4.79183E+00 1.521651297570190 3.43024E-03
        4.82326E+00 1.519578861592620 3.53426E-03
        4.85489E+00 1.517470323292170 3.64215E-03
        4.88673E+00 1.515324876890920 3.75406E-03
        4.91878E+00 1.513141703518580 3.87017E-03
        4.95104E+00 1.510919965435840 3.99066E-03
        4.98351E+00 1.508658804858450 4.11572E-03
        5.01619E+00 1.506357342901470 4.24555E-03
        5.04909E+00 1.504014676333500 4.38035E-03
        5.08221E+00 1.501629877836750 4.52035E-03
        5.11554E+00 1.499201994101170 4.66578E-03
        5.14909E+00 1.496730041154380 4.81687E-03
        5.18286E+00 1.494212991185280 4.97388E-03
        5.21685E+00 1.491649851859120 5.13722E-03
        5.25106E+00 1.489039616700160 5.30706E-03
        5.28550E+00 1.486381186087810 5.48366E-03
        5.32016E+00 1.483673432182820 5.66735E-03
        5.35506E+00 1.480915200839180 5.85844E-03
        5.39018E+00 1.478105306159860 6.05728E-03
        5.42553E+00 1.475242527589850 6.26422E-03
        5.46111E+00 1.472325609441220 6.47964E-03
        5.49692E+00 1.469353257615610 6.70394E-03
        5.53298E+00 1.466324139252410 6.93753E-03
        5.56926E+00 1.463236876360480 7.18085E-03
        5.60579E+00 1.460090039395870 7.43436E-03
        5.64255E+00 1.456882139641970 7.69858E-03
        5.67956E+00 1.453611766244070 7.97425E-03
        5.71681E+00 1.450277458986380 8.26167E-03
        5.75430E+00 1.446877595649160 8.56143E-03
        5.79204E+00 1.443410530079130 8.87411E-03
        5.83003E+00 1.439874568407920 9.20034E-03
        5.86826E+00 1.436267970026610 9.54080E-03
        5.90675E+00 1.432588939792350 9.89619E-03
        5.94549E+00 1.428835623315680 1.02672E-02
        5.98448E+00 1.425006107664720 1.06548E-02
        6.02373E+00 1.421098414745990 1.10595E-02
        6.06323E+00 1.417110496492380 1.14825E-02
        6.10300E+00 1.413040209800540 1.19245E-02
        6.14302E+00 1.408885374273110 1.23867E-02
        6.18331E+00 1.404643920245690 1.28703E-02
        6.22386E+00 1.400313645765200 1.33762E-02
        6.26468E+00 1.395892119147910 1.39054E-02
        6.30577E+00 1.391376874723770 1.44591E-02
        6.34712E+00 1.386765374647790 1.50388E-02
        6.38875E+00 1.382054996810850 1.56456E-02
        6.43065E+00 1.377243039042360 1.62811E-02
        6.47282E+00 1.372326707008770 1.69468E-02
        6.51527E+00 1.367303106900190 1.76443E-02
        6.55800E+00 1.362169247374550 1.83752E-02
        6.60101E+00 1.356922012945480 1.91415E-02
        6.64431E+00 1.351558113433640 1.99450E-02
        6.68788E+00 1.346074341553290 2.07883E-02
        6.73174E+00 1.340467621416030 2.16735E-02
        6.77589E+00 1.334734555862260 2.26025E-02
        6.82033E+00 1.328871460715340 2.35777E-02
        6.86506E+00 1.322874581415750 2.46017E-02
        6.91008E+00 1.316740064007720 2.56773E-02
        6.95540E+00 1.310463927075240 2.68073E-02
        7.00102E+00 1.304042049826600 2.79949E-02
        7.04693E+00 1.297470184522110 2.92432E-02
        7.09315E+00 1.290743934932280 3.05558E-02
        7.13967E+00 1.283858744914210 3.19364E-02
        7.18649E+00 1.276809843940370 3.33889E-02
        7.23363E+00 1.269592138620790 3.49175E-02
        7.28107E+00 1.262201019932470 3.65281E-02
        7.32882E+00 1.254632017514700 3.82247E-02
        7.37688E+00 1.246879852070860 4.00118E-02
        7.42526E+00 1.238938993492500 4.18949E-02
        7.47396E+00 1.230803820823430 4.38796E-02
        7.52298E+00 1.222468555827520 4.59721E-02
        7.57232E+00 1.213927277838100 4.81789E-02
        7.62198E+00 1.205173882292390 5.05070E-02
        7.67197E+00 1.196202092338500 5.29636E-02
        7.72228E+00 1.187005431752020 5.55568E-02
        7.77293E+00 1.177577190777770 5.82949E-02
        7.82390E+00 1.167910397980670 6.11869E-02
        7.87522E+00 1.157997418339200 6.42425E-02
        7.92686E+00 1.147832341301520 6.74760E-02
        7.97885E+00 1.137409386330670 7.08949E-02
        8.03118E+00 1.126720760622040 7.45109E-02
        8.08385E+00 1.115758869987010 7.83365E-02
        8.13687E+00 1.104516104666020 8.23852E-02
        8.19023E+00 1.092984749609240 8.66713E-02
        8.24395E+00 1.081157039180950 9.12102E-02
        8.29801E+00 1.069025136319370 9.60184E-02
        8.35243E+00 1.056581159733570 1.01114E-01
        8.40721E+00 1.043817186081870 1.06515E-01
        8.46235E+00 1.030725142962560 1.12242E-01
        8.51785E+00 1.017296576656040 1.18317E-01
        8.57371E+00 1.003523062497380 1.24765E-01
        8.62994E+00 0.989400209086747 1.31617E-01
        8.68654E+00 0.974923456735929 1.38894E-01
        8.74351E+00 0.960085193787309 1.46623E-01
        8.80085E+00 0.944879122784223 1.54838E-01
        8.85857E+00 0.929299713531898 1.63569E-01
        8.91667E+00 0.913342127057932 1.72855E-01
        8.97515E+00 0.897002399423075 1.82732E-01
        9.03401E+00 0.880277615373227 1.93243E-01
        9.09326E+00 0.863166104549964 2.04433E-01
        9.15290E+00 0.845667535926177 2.16348E-01
        9.21292E+00 0.827782606202461 2.29042E-01
        9.27334E+00 0.809512763664602 2.42569E-01
        9.33416E+00 0.790864403146470 2.56999E-01
        9.39538E+00 0.771853329407213 2.72402E-01
        9.45700E+00 0.752495496045543 2.88838E-01
        9.51902E+00 0.732804715818552 3.06381E-01
        9.58145E+00 0.712799992267880 3.25113E-01
        9.64429E+00 0.692504652356363 3.45123E-01
        9.70754E+00 0.671945026260992 3.66505E-01
        9.77120E+00 0.651147869599608 3.89362E-01
        9.83529E+00 0.630132517774319 4.13805E-01
        9.89979E+00 0.608883972248707 4.39955E-01
        9.96472E+00 0.587211699272394 4.67943E-01
        1.00301E+01 0.565542945420634 4.99480E-01
        1.00958E+01 0.545787178325216 5.35424E-01
        1.01621E+01 0.527497728187508 5.70226E-01
        1.02287E+01 0.509279209443452 6.07447E-01
        1.02958E+01 0.491800187373704 6.47497E-01
        1.03633E+01 0.475486324176110 6.90367E-01
        1.04313E+01 0.460752060660168 7.36459E-01
        1.04997E+01 0.448143837200553 7.85920E-01
        1.05686E+01 0.438305184053017 8.39052E-01
        1.06379E+01 0.432155228316041 8.96214E-01
        1.07076E+01 0.430836827231155 9.57562E-01
        1.07779E+01 0.435376336748560 1.02374E+00
        1.08485E+01 0.464343806865374 1.11546E+00
        1.09197E+01 0.504411819226125 1.14348E+00
        1.09913E+01 0.527384376569920 1.16783E+00
        1.10634E+01 0.543767118919604 1.20347E+00
        1.11359E+01 0.558269319304460 1.23914E+00
        1.12090E+01 0.585837589425270 1.30087E+00
        1.12825E+01 0.614961866059365 1.31000E+00
        1.13565E+01 0.621550635436473 1.32956E+00
        1.14310E+01 0.647250564269838 1.41172E+00
        1.15059E+01 0.686615621504651 1.41700E+00
        1.15814E+01 0.688914917408205 1.41040E+00
        1.16574E+01 0.704203377316155 1.50778E+00
        1.17338E+01 0.744807276054801 1.53000E+00
        1.18108E+01 0.781610185214401 1.57128E+00
        1.18882E+01 0.822023109093949 1.59000E+00
        1.19662E+01 0.848717703416586 1.59433E+00
        1.20447E+01 0.869543335382157 1.62735E+00
        1.21237E+01 0.905079683884272 1.67000E+00
        1.22032E+01 0.941534460643039 1.67737E+00
        1.22832E+01 0.971312295573542 1.70172E+00
        1.23638E+01 1.001056600058300 1.72000E+00
        1.24448E+01 1.040012498558980 1.76041E+00
        1.25265E+01 1.088297161630120 1.77000E+00
        1.26086E+01 1.123090238784290 1.76000E+00
        1.26913E+01 1.150653216637130 1.77345E+00
        1.27745E+01 1.171395886279800 1.77000E+00
        1.28583E+01 1.211525589859640 1.83000E+00
        1.29427E+01 1.253012320898790 1.78703E+00
        1.30275E+01 1.266064897463890 1.79000E+00
        1.31130E+01 1.272832074027260 1.79518E+00
        1.31990E+01 1.304267177995370 1.86857E+00
        1.32855E+01 1.365530780506660 1.87613E+00
        1.33727E+01 1.408089547354180 1.84356E+00
        1.34604E+01 1.429563083129160 1.82743E+00
        1.35486E+01 1.428262886832430 1.80000E+00
        1.36375E+01 1.437921343402710 1.86251E+00
        1.37269E+01 1.471752409724760 1.87000E+00
        1.38170E+01 1.498102376919700 1.87995E+00
        1.39076E+01 1.532928506022130 1.90860E+00
        1.39988E+01 1.576522074810250 1.91136E+00
        1.40906E+01 1.610289270580320 1.89701E+00
        1.41830E+01 1.631438035742010 1.89000E+00
        1.42760E+01 1.650330372380670 1.90000E+00
        1.43697E+01 1.678337446453470 1.92205E+00
        1.44639E+01 1.718942462228200 1.93963E+00
        1.45588E+01 1.759650619603710 1.93472E+00
        1.46542E+01 1.805332096873260 1.95000E+00
        1.47504E+01 1.852981751695880 1.92659E+00
        1.48471E+01 1.885110695483730 1.90224E+00
        1.49445E+01 1.915020697952160 1.89790E+00
        1.50425E+01 1.947467331744930 1.88355E+00
        1.51411E+01 1.983994154263260 1.88000E+00
        1.52404E+01 2.027223287525490 1.85971E+00
        1.53404E+01 2.058028032052360 1.81102E+00
        1.54410E+01 2.075440484671330 1.78232E+00
        1.55423E+01 2.086671940768090 1.75182E+00
        1.56442E+01 2.117193420470790 1.77000E+00
        1.57468E+01 2.165796943571480 1.71938E+00
        1.58501E+01 2.184789901084480 1.62512E+00
        1.59540E+01 2.160103928679480 1.53329E+00
        1.60586E+01 2.105464651763790 1.48009E+00
        1.61640E+01 2.050128635023410 1.47574E+00
        1.62700E+01 1.999874297699820 1.47000E+00
        1.63767E+01 1.945564447155390 1.48296E+00
        1.64841E+01 1.892643695834760 1.52190E+00
        1.65922E+01 1.854853381951420 1.59990E+00
        1.67010E+01 1.865252311824830 1.72397E+00
        1.68105E+01 1.927660170682050 1.80068E+00
        1.69208E+01 1.987875659982270 1.79531E+00
        1.70318E+01 2.028939734782410 1.80807E+00
        1.71435E+01 2.089847929149790 1.84324E+00
        1.72559E+01 2.152543002791110 1.79455E+00
        1.73691E+01 2.170745183979750 1.72379E+00
        1.74830E+01 2.163293190542590 1.70642E+00
        1.75976E+01 2.168339938135290 1.71924E+00
        1.77130E+01 2.174511779088990 1.70000E+00
        1.78292E+01 2.196198975743440 1.73891E+00
        1.79461E+01 2.227490816334370 1.69478E+00
        1.80638E+01 2.213016709146950 1.63185E+00
        1.81823E+01 2.187309745431550 1.66249E+00
        1.83016E+01 2.203973686466970 1.71368E+00
        1.84216E+01 2.244739201227320 1.70526E+00
        1.85424E+01 2.250098677738810 1.62893E+00
        1.86640E+01 2.214410232503240 1.61012E+00
        1.87864E+01 2.189990533612130 1.65269E+00
        1.89096E+01 2.199860581447980 1.69858E+00
        1.90336E+01 2.220634680039810 1.70000E+00
        1.91585E+01 2.235228740225120 1.70000E+00
        1.92841E+01 2.235227765503800 1.67516E+00
        1.94106E+01 2.189698535293420 1.64596E+00
        1.95379E+01 2.193798818342230 1.82153E+00
        1.96660E+01 2.291915438916090 1.86210E+00
        1.97950E+01 2.359547097122390 1.76401E+00
        1.99248E+01 2.340757608309690 1.65662E+00
        2.00555E+01 2.274633249203320 1.64845E+00
        2.01870E+01 2.243814773244170 1.74610E+00
        2.03194E+01 2.273764215657090 1.81915E+00
        2.04527E+01 2.327459565793650 1.83854E+00
        2.05868E+01 2.367641113503010 1.80492E+00
        2.07218E+01 2.368668117714760 1.75173E+00
        2.08577E+01 2.332933003530080 1.73000E+00
        2.09945E+01 2.268480681819540 1.74811E+00
        2.11322E+01 2.275101786112180 1.96463E+00
        2.12708E+01 2.436799899671820 2.10681E+00
        2.14103E+01 2.543345238242160 1.86194E+00
        2.15507E+01 2.484393254530710 1.74550E+00
        2.16921E+01 2.377345125970530 1.75985E+00
        2.18343E+01 2.362989529220210 2.00195E+00
        2.19775E+01 2.503524541218050 2.14562E+00
        2.21217E+01 2.639439579075550 2.03133E+00
        2.22667E+01 2.687016621829950 1.92662E+00
        2.24128E+01 2.660672347687520 1.80684E+00
        2.25598E+01 2.611949462350230 1.83185E+00
        2.27077E+01 2.598503817791630 1.85973E+00
        2.28566E+01 2.570493477105630 1.84000E+00
        2.30065E+01 2.533707804533950 1.92172E+00
        2.31574E+01 2.580170072449850 2.09323E+00
        2.33093E+01 2.689474748985780 2.12469E+00
        2.34622E+01 2.790320697079550 2.10599E+00
        2.36161E+01 2.847610112359450 2.00824E+00
        2.37709E+01 2.844101552694090 1.93931E+00
        2.39268E+01 2.813249492857610 1.93000E+00
        2.40838E+01 2.804901704807030 2.00508E+00
        2.42417E+01 2.874757731834950 2.11748E+00
        2.44007E+01 2.989550711918210 2.09576E+00
        2.45607E+01 3.052253704415610 1.96788E+00
        2.47218E+01 3.036742204885900 1.85968E+00
        2.48839E+01 2.972260730716450 1.81000E+00
        2.50471E+01 2.904653036088210 1.85639E+00
        2.52114E+01 2.884976144659220 1.96906E+00
        2.53767E+01 2.916921743483520 2.06249E+00
        2.55432E+01 2.982765482349750 2.14552E+00
        2.57107E+01 3.079055639821350 2.20570E+00
        2.58793E+01 3.199435686788980 2.23000E+00
        2.60490E+01 3.320029987129370 2.18538E+00
        2.62199E+01 3.412369207491340 2.09645E+00
        2.63918E+01 3.459521862256600 1.97882E+00
        2.65649E+01 3.458039692593710 1.87626E+00
        2.67391E+01 3.429000278099150 1.82107E+00
        2.69145E+01 3.392468309848020 1.80000E+00
        2.70910E+01 3.359841266604760 1.81762E+00
        2.72687E+01 3.348297992783950 1.87589E+00
        2.74475E+01 3.388648405241770 1.97526E+00
        2.76275E+01 3.488898018337520 2.02934E+00
        2.78087E+01 3.578832024293230 1.95496E+00
        2.79911E+01 3.621908418152790 1.90000E+00
        2.81747E+01 3.651189073125510 1.87000E+00
        2.83595E+01 3.682126469185560 1.85195E+00
        2.85455E+01 3.719902315341390 1.83761E+00
        2.87327E+01 3.761969081110050 1.81326E+00
        2.89211E+01 3.799952045221730 1.77891E+00
        2.91108E+01 3.836957157165910 1.75457E+00
        2.93017E+01 3.875832585661830 1.72023E+00
        2.94939E+01 3.911611353659930 1.68175E+00
        2.96873E+01 3.944385413994120 1.64153E+00
        2.98820E+01 3.973022571480280 1.59719E+00
        3.00780E+01 3.997767591736470 1.55567E+00
        3.02752E+01 4.022699081074360 1.51699E+00
        3.04738E+01 4.044321286707170 1.46829E+00
        3.06737E+01 4.063509903463630 1.42960E+00
        3.08748E+01 4.080752078026170 1.38091E+00
        3.10773E+01 4.095678245609810 1.34111E+00
        3.12811E+01 4.109740837959400 1.29351E+00
        3.14863E+01 4.117685114823980 1.24482E+00
        3.16928E+01 4.123911176519330 1.20613E+00
        3.19006E+01 4.131042357702630 1.16372E+00
        3.21099E+01 4.134748983235480 1.11875E+00
        3.23204E+01 4.136591871704160 1.08005E+00
        3.25324E+01 4.139349971501050 1.04069E+00
        3.27458E+01 4.138524686624070 9.94871E-01
        3.29605E+01 4.134334478543950 9.57184E-01
        3.31767E+01 4.130018538887610 9.19466E-01
        3.33943E+01 4.124732011945810 8.82947E-01
        3.36133E+01 4.118129199562240 8.46533E-01
        3.38337E+01 4.110478156152250 8.12443E-01
        3.40556E+01 4.101969375349700 7.78358E-01
        3.42790E+01 4.092175438975940 7.45687E-01
        3.45038E+01 4.081720628886490 7.14882E-01
        3.47301E+01 4.070740643295580 6.84660E-01
        3.49579E+01 4.058944666026170 6.55445E-01
        3.51871E+01 4.046325086066240 6.27382E-01
        3.54179E+01 4.033277664837880 6.01179E-01
        3.56502E+01 4.020064836074010 5.75834E-01
        3.58840E+01 4.006566379862260 5.51486E-01
        3.61193E+01 3.992807652173760 5.28030E-01
        3.63562E+01 3.978532745245620 5.05113E-01
        3.65946E+01 3.963941670671950 4.83960E-01
        3.68346E+01 3.949296497869380 4.63481E-01
        3.70762E+01 3.934435416928270 4.44002E-01
        3.73194E+01 3.919439978616500 4.25585E-01
        3.75641E+01 3.904658804605240 4.08543E-01
        3.78105E+01 3.889915981232480 3.91501E-01
        3.80585E+01 3.875116204147470 3.75822E-01
        3.83081E+01 3.860171544119750 3.60213E-01
        3.85593E+01 3.845316247996610 3.46608E-01
        3.88122E+01 3.830785368698910 3.32995E-01
        3.90667E+01 3.816369459114870 3.20493E-01
        3.93229E+01 3.802141960235240 3.08317E-01
        3.95808E+01 3.788131793745220 2.97115E-01
        3.98404E+01 3.774272294143490 2.85970E-01
        4.01017E+01 3.760397949760900 2.75638E-01
        4.03647E+01 3.746612219038100 2.65900E-01
        4.06294E+01 3.733110196238240 2.57162E-01
        4.08959E+01 3.719903172976430 2.48567E-01
        4.11641E+01 3.706599914260400 2.40264E-01
        4.14341E+01 3.693168810797440 2.32959E-01
        4.17058E+01 3.679943450475130 2.27000E-01
        4.19793E+01 3.668032543258170 2.23236E-01
        4.22547E+01 3.657358034323850 2.18047E-01
        4.25318E+01 3.646632475475820 2.12496E-01
        4.28107E+01 3.636443773363180 2.08627E-01
        4.30915E+01 3.627002831708520 2.03758E-01
        4.33741E+01 3.617622090281700 1.98888E-01
        4.36586E+01 3.608410499792750 1.94370E-01
        4.39449E+01 3.599527605057450 1.90093E-01
        4.42331E+01 3.590965403759530 1.85845E-01
        4.45232E+01 3.582643078269790 1.81624E-01
        4.48152E+01 3.574505076119650 1.77430E-01
        4.51091E+01 3.566488505051960 1.73264E-01
        4.54049E+01 3.558464264628600 1.69125E-01
        4.57027E+01 3.550624536572740 1.65682E-01
        4.60025E+01 3.543175192032870 1.62283E-01
        4.63042E+01 3.536000210510440 1.58906E-01
        4.66078E+01 3.529046752138230 1.55552E-01
        4.69135E+01 3.522283158962680 1.52218E-01
        4.72212E+01 3.515686076515330 1.48907E-01
        4.75309E+01 3.509235724223030 1.45617E-01
        4.78426E+01 3.502916741273670 1.42354E-01
        4.81564E+01 3.496717522620060 1.39118E-01
        4.84722E+01 3.490624036081610 1.35903E-01
        4.87901E+01 3.484619337709320 1.32709E-01
        4.91101E+01 3.478684365702940 1.29536E-01
        4.94322E+01 3.472792784194370 1.26383E-01
        4.97563E+01 3.466892582932010 1.23251E-01
        5.00827E+01 3.460962360948260 1.20289E-01
        5.04111E+01 3.455166985136240 1.17735E-01
        5.07417E+01 3.449599603746140 1.15198E-01
        5.10745E+01 3.444181010827220 1.12677E-01
        5.14095E+01 3.438876613395170 1.10173E-01
        5.17466E+01 3.433661214737290 1.07685E-01
        5.20860E+01 3.428507729223740 1.05213E-01
        5.24276E+01 3.423364952954390 1.02757E-01
        5.27715E+01 3.418281186660920 1.00545E-01
        5.31176E+01 3.413354819160700 9.84494E-02
        5.34659E+01 3.408575121304650 9.63671E-02
        5.38166E+01 3.403906915715470 9.42983E-02
        5.41695E+01 3.399332049294510 9.22430E-02
        5.45248E+01 3.394837065998070 9.02012E-02
        5.48824E+01 3.390409420522380 8.81726E-02
        5.52423E+01 3.386033732720170 8.61572E-02
        5.56046E+01 3.381681562934540 8.41584E-02
        5.59693E+01 3.377394513586710 8.23182E-02
        5.63363E+01 3.373212986903250 8.04900E-02
        5.67058E+01 3.369107185744260 7.86738E-02
        5.70777E+01 3.365062476740810 7.68693E-02
        5.74521E+01 3.361066915556890 7.50766E-02
        5.78288E+01 3.357107419326170 7.32956E-02
        5.82081E+01 3.353164929575370 7.15262E-02
        5.85899E+01 3.349195624841360 6.97684E-02
        5.89741E+01 3.345235079320140 6.82219E-02
        5.93609E+01 3.341394134005490 6.68416E-02
        5.97502E+01 3.337687485294440 6.54703E-02
        6.01421E+01 3.334075978818080 6.41079E-02
        6.05365E+01 3.330542604157030 6.27544E-02
        6.09335E+01 3.327076565613030 6.14098E-02
        6.13331E+01 3.323669458784030 6.00738E-02
        6.17354E+01 3.320313482142460 5.87466E-02
        6.21403E+01 3.316999463270160 5.74281E-02
        6.25478E+01 3.313709898961950 5.61181E-02
        6.29580E+01 3.310464163744510 5.48966E-02
        6.33709E+01 3.307289655459550 5.36990E-02
        6.37865E+01 3.304175262602410 5.25093E-02
        6.42048E+01 3.301110693875210 5.13273E-02
        6.46259E+01 3.298089310503380 5.01530E-02
        6.50498E+01 3.295105267304950 4.89864E-02
        6.54764E+01 3.292152265958080 4.78273E-02
        6.59058E+01 3.289221858462660 4.66758E-02
        6.63380E+01 3.286297612773920 4.55319E-02
        6.67731E+01 3.283372032268540 4.44416E-02
        6.72110E+01 3.280497743327740 4.34838E-02
        6.76518E+01 3.277705289999920 4.25323E-02
        6.80955E+01 3.274969500108290 4.15870E-02
        6.85421E+01 3.272279764475110 4.06479E-02
        6.89916E+01 3.269629041265910 3.97149E-02
        6.94441E+01 3.267011329055770 3.87879E-02
        6.98995E+01 3.264420380706560 3.78670E-02
        7.03580E+01 3.261848151694940 3.69521E-02
        7.08194E+01 3.259280588687420 3.60432E-02
        7.12838E+01 3.256690446669070 3.51535E-02
        7.17514E+01 3.254139824243380 3.44561E-02
        7.22219E+01 3.251684882365950 3.37633E-02
        7.26956E+01 3.249293156572880 3.30750E-02
        7.31723E+01 3.246952633473320 3.23911E-02
        7.36522E+01 3.244656477750210 3.17118E-02
        7.41353E+01 3.242399906316920 3.10368E-02
        7.46215E+01 3.240179090331540 3.03663E-02
        7.51109E+01 3.237990605101230 2.97001E-02
        7.56035E+01 3.235831000793910 2.90383E-02
        7.60993E+01 3.233696166989740 2.83807E-02
        7.65984E+01 3.231579332528320 2.77275E-02
        7.71008E+01 3.229474108430630 2.70914E-02
        7.76064E+01 3.227400820409020 2.65152E-02
        7.81154E+01 3.225373705454030 2.59427E-02
        7.86277E+01 3.223381473024520 2.53739E-02
        7.91434E+01 3.221419109353070 2.48088E-02
        7.96624E+01 3.219483121765530 2.42475E-02
        8.01849E+01 3.217570477519990 2.36897E-02
        8.07107E+01 3.215678121036350 2.31357E-02
        8.12401E+01 3.213802547454880 2.25852E-02
        8.17729E+01 3.211939123268580 2.20383E-02
        8.23092E+01 3.210080415246030 2.14950E-02
        8.28490E+01 3.208209296247370 2.09552E-02
        8.33923E+01 3.206325536818950 2.04810E-02
        8.39392E+01 3.204486885188290 2.01307E-02
        8.44897E+01 3.202721403386540 1.97828E-02
        8.50439E+01 3.201005434724990 1.94371E-02
        8.56016E+01 3.199330024158280 1.90937E-02
        8.61630E+01 3.197690172423930 1.87526E-02
        8.67281E+01 3.196082543581220 1.84136E-02
        8.72969E+01 3.194504662815740 1.80769E-02
        8.78694E+01 3.192954556502370 1.77423E-02
        8.84457E+01 3.191430560650380 1.74099E-02
        8.90258E+01 3.189931200140650 1.70797E-02
        8.96096E+01 3.188455089079400 1.67517E-02
        9.01973E+01 3.187000793300310 1.64258E-02
        9.07889E+01 3.185566394193100 1.61020E-02
        9.13843E+01 3.184151188281410 1.57841E-02
        9.19836E+01 3.182757591738390 1.54747E-02
        9.25869E+01 3.181386224295100 1.51673E-02
        9.31941E+01 3.180035045716680 1.48620E-02
        9.38053E+01 3.178702817754210 1.45586E-02
        9.44205E+01 3.177388512547030 1.42572E-02
        9.50397E+01 3.176091171361010 1.39577E-02
        9.56630E+01 3.174809837907890 1.36603E-02
        9.62904E+01 3.173543504472220 1.33647E-02
        9.69219E+01 3.172291045317180 1.30711E-02
        9.75576E+01 3.171051107414660 1.27794E-02
        9.81974E+01 3.169821888828720 1.24896E-02
        9.88414E+01 3.168600567842070 1.22016E-02
        9.94897E+01 3.167381039485900 1.19156E-02
        1.00142E+02 3.166159772496690 1.16489E-02
        1.00799E+02 3.164959360479760 1.14385E-02
        1.01460E+02 3.163794071001890 1.12294E-02
        1.02125E+02 3.162653684344740 1.10218E-02
        1.02795E+02 3.161534314461960 1.08155E-02
        1.03469E+02 3.160433727110480 1.06105E-02
        1.04148E+02 3.159350358066060 1.04068E-02
        1.04831E+02 3.158282969247650 1.02045E-02
        1.05518E+02 3.157230488898770 1.00035E-02
        1.06211E+02 3.156191916947840 9.80385E-03
        1.06907E+02 3.155166250457220 9.60547E-03
        1.07608E+02 3.154152400968140 9.40838E-03
        1.08314E+02 3.153149066636370 9.21258E-03
        1.09024E+02 3.152154468630070 9.01805E-03
        1.09739E+02 3.151165614328870 8.82478E-03
        1.10459E+02 3.150174844514070 8.63278E-03
        1.11183E+02 3.149191327252110 8.48146E-03
        1.11913E+02 3.148233515367420 8.35034E-03
        1.12647E+02 3.147300863174410 8.22007E-03
        1.13385E+02 3.146387788500770 8.09066E-03
        1.14129E+02 3.145491846644350 7.96208E-03
        1.14878E+02 3.144611543635590 7.83435E-03
        1.15631E+02 3.143745810774660 7.70744E-03
        1.16389E+02 3.142893806769840 7.58136E-03
        1.17153E+02 3.142054824008740 7.45611E-03
        1.17921E+02 3.141228236380960 7.33167E-03
        1.18694E+02 3.140413465582560 7.20804E-03
        1.19473E+02 3.139609955279060 7.08522E-03
        1.20256E+02 3.138817146556750 6.96320E-03
        1.21045E+02 3.138034448195870 6.84197E-03
        1.21839E+02 3.137261191181100 6.72153E-03
        1.22638E+02 3.136496542431640 6.60188E-03
        1.23442E+02 3.135739298071830 6.48300E-03
        1.24252E+02 3.134987161863830 6.36490E-03
        1.25067E+02 3.134236458985890 6.25095E-03
        1.25887E+02 3.133497062275700 6.16605E-03
        1.26712E+02 3.132777281939720 6.08169E-03
        1.27544E+02 3.132072119842300 5.99789E-03
        1.28380E+02 3.131379718170880 5.91464E-03
        1.29222E+02 3.130699023896840 5.83192E-03
        1.30069E+02 3.130029312380630 5.74975E-03
        1.30922E+02 3.129370025603940 5.66811E-03
        1.31781E+02 3.128720701246410 5.58700E-03
        1.32645E+02 3.128080935963070 5.50642E-03
        1.33515E+02 3.127450363697970 5.42637E-03
        1.34391E+02 3.126828641142370 5.34684E-03
        1.35272E+02 3.126215436462600 5.26782E-03
        1.36159E+02 3.125610418900740 5.18932E-03
        1.37052E+02 3.125013247135910 5.11134E-03
        1.37951E+02 3.124423553577970 5.03386E-03
        1.38856E+02 3.123840919332240 4.95688E-03
        1.39767E+02 3.123264827550360 4.88041E-03
        1.40683E+02 3.122694559716520 4.80443E-03
        1.41606E+02 3.122128898134290 4.72895E-03
        1.42535E+02 3.121564720019610 4.65397E-03
        1.43469E+02 3.121005807523180 4.59559E-03
        1.44410E+02 3.120459612258080 4.54519E-03
        1.45358E+02 3.119925816418090 4.49511E-03
        1.46311E+02 3.119402168680640 4.44536E-03
        1.47270E+02 3.118887672499920 4.39594E-03
        1.48236E+02 3.118381713636500 4.34684E-03
        1.49208E+02 3.117883850142880 4.29806E-03
        1.50187E+02 3.117393733592530 4.24960E-03
        1.51172E+02 3.116911072276060 4.20145E-03
        1.52163E+02 3.116435611413170 4.15361E-03
        1.53161E+02 3.115967121338580 4.10609E-03
        1.54166E+02 3.115505389782450 4.05888E-03
        1.55177E+02 3.115050216349300 4.01197E-03
        1.56195E+02 3.114601408142630 3.96537E-03
        1.57219E+02 3.114158775845730 3.91908E-03
        1.58250E+02 3.113722129680490 3.87308E-03
        1.59288E+02 3.113291274583230 3.82739E-03
        1.60333E+02 3.112866003591790 3.78199E-03
        1.61384E+02 3.112446087564300 3.73689E-03
        1.62443E+02 3.112031257108990 3.69208E-03
        1.63508E+02 3.111621166076040 3.64757E-03
        1.64580E+02 3.111215302100540 3.60334E-03
        1.65660E+02 3.110812674700170 3.55941E-03
        1.66746E+02 3.110411607609610 3.51713E-03
        1.67840E+02 3.110016499443710 3.48783E-03
        1.68940E+02 3.109631113086480 3.45872E-03
        1.70048E+02 3.109253226872830 3.42980E-03
        1.71164E+02 3.108882023845040 3.40107E-03
        1.72286E+02 3.108517046788280 3.37252E-03
        1.73416E+02 3.108157985710010 3.34416E-03
        1.74553E+02 3.107804606066820 3.31599E-03
        1.75698E+02 3.107456717659890 3.28800E-03
        1.76850E+02 3.107114158924980 3.26019E-03
        1.78010E+02 3.106776788121860 3.23256E-03
        1.79178E+02 3.106444478001610 3.20511E-03
        1.80353E+02 3.106117112387480 3.17784E-03
        1.81536E+02 3.105794583884100 3.15075E-03
        1.82726E+02 3.105476792291800 3.12384E-03
        1.83925E+02 3.105163643485190 3.09710E-03
        1.85131E+02 3.104855048614680 3.07053E-03
        1.86345E+02 3.104550923547380 3.04414E-03
        1.87567E+02 3.104251188501450 3.01792E-03
        1.88797E+02 3.103955767856920 2.99187E-03
        1.90036E+02 3.103664590154740 2.96599E-03
        1.91282E+02 3.103377588335180 2.94028E-03
        1.92536E+02 3.103094700336210 2.91474E-03
        1.93799E+02 3.102815870320710 2.88936E-03
        1.95070E+02 3.102541051170260 2.86415E-03
        1.96349E+02 3.102270209983240 2.83911E-03
        1.97637E+02 3.102003342577710 2.81422E-03
        1.98933E+02 3.101740530269380 2.78950E-03
        2.00238E+02 3.101481826775400 2.76453E-03
        2.01551E+02 3.101226545540630 2.73818E-03
        2.02873E+02 3.100974193664360 2.71200E-03
        2.04204E+02 3.100724984820040 2.68599E-03
        2.05543E+02 3.100478956269830 2.66015E-03
        2.06891E+02 3.100236100151400 2.63448E-03
        2.08248E+02 3.099996390612690 2.60897E-03
        2.09613E+02 3.099759793041490 2.58363E-03
        2.10988E+02 3.099526268059600 2.55846E-03
        2.12372E+02 3.099295773517190 2.53345E-03
        2.13765E+02 3.099068265584000 2.50860E-03
        2.15167E+02 3.098843699381430 2.48392E-03
        2.16578E+02 3.098622029358900 2.45939E-03
        2.17998E+02 3.098403209516310 2.43503E-03
        2.19428E+02 3.098187193526580 2.41082E-03
        2.20867E+02 3.097973934788110 2.38677E-03
        2.22315E+02 3.097763386423070 2.36288E-03
        2.23774E+02 3.097555501229530 2.33915E-03
        2.25241E+02 3.097350231589070 2.31557E-03
        2.26718E+02 3.097147529327170 2.29214E-03
        2.28205E+02 3.096947345518120 2.26886E-03
        2.29702E+02 3.096749630220620 2.24574E-03
        2.31208E+02 3.096554332121240 2.22277E-03
        2.32725E+02 3.096361398050620 2.19995E-03
        2.34251E+02 3.096170772316140 2.17727E-03
        2.35787E+02 3.095982395760190 2.15475E-03
        2.37334E+02 3.095796204390560 2.13237E-03
        2.38890E+02 3.095612127311780 2.11013E-03
        2.40457E+02 3.095430083447660 2.08804E-03
        2.42034E+02 3.095249976020550 2.06610E-03
        2.43621E+02 3.095071682462940 2.04430E-03
        2.45219E+02 3.094895033756390 2.02264E-03
        2.46827E+02 3.094719764035340 2.00112E-03
        2.48446E+02 3.094545340213920 1.97974E-03
        2.50075E+02 3.094370690701800 1.95909E-03
        2.51715E+02 3.094198448837610 1.94633E-03
        2.53366E+02 3.094030978458820 1.93365E-03
        2.55028E+02 3.093866963773560 1.92105E-03
        2.56701E+02 3.093705938337970 1.90853E-03
        2.58384E+02 3.093547651498170 1.89610E-03
        2.60079E+02 3.093391940114830 1.88374E-03
        2.61784E+02 3.093238685399870 1.87147E-03
        2.63501E+02 3.093087794274330 1.85927E-03
        2.65229E+02 3.092939189984530 1.84716E-03
        2.66969E+02 3.092792806856940 1.83512E-03
        2.68720E+02 3.092648587132900 1.82317E-03
        2.70482E+02 3.092506478942820 1.81129E-03
        2.72256E+02 3.092366434947950 1.79949E-03
        2.74042E+02 3.092228411394370 1.78776E-03
        2.75839E+02 3.092092367433100 1.77611E-03
        2.77648E+02 3.091958264618040 1.76454E-03
        2.79469E+02 3.091826066526780 1.75304E-03
        2.81302E+02 3.091695738468260 1.74162E-03
        2.83146E+02 3.091567247253450 1.73027E-03
        2.85003E+02 3.091440561012580 1.71900E-03
        2.86873E+02 3.091315649047470 1.70780E-03
        2.88754E+02 3.091192481710540 1.69667E-03
        2.90648E+02 3.091071030304720 1.68562E-03
        2.92554E+02 3.090951266999580 1.67463E-03
        2.94473E+02 3.090833164760510 1.66372E-03
        2.96404E+02 3.090716697288260 1.65288E-03
        2.98348E+02 3.090601838966950 1.64211E-03
        3.00304E+02 3.090488564819050 1.63141E-03
        3.02274E+02 3.090376850465970 1.62078E-03
        3.04256E+02 3.090266672093500 1.61022E-03
        3.06252E+02 3.090158006421200 1.59973E-03
        3.08260E+02 3.090050830675120 1.58931E-03
        3.10282E+02 3.089945122563400 1.57895E-03
        3.12317E+02 3.089840860254330 1.56867E-03
        3.14365E+02 3.089738022356480 1.55845E-03
        3.16427E+02 3.089636587900610 1.54829E-03
        3.18502E+02 3.089536536323240 1.53820E-03
        3.20591E+02 3.089437847451470 1.52818E-03
        3.22694E+02 3.089340501489120 1.51822E-03
        3.24810E+02 3.089244479003840 1.50833E-03
        3.26940E+02 3.089149760915220 1.49850E-03
        3.29084E+02 3.089056328483670 1.48874E-03
        3.31243E+02 3.088964163300090 1.47904E-03
        3.33415E+02 3.088873247276200 1.46940E-03
        3.35602E+02 3.088783562635410 1.45983E-03
        3.37803E+02 3.088695091904300 1.45032E-03
        3.40018E+02 3.088607817904530 1.44087E-03
        3.42248E+02 3.088521723745200 1.43148E-03
        3.44493E+02 3.088436792815660 1.42215E-03
        3.46752E+02 3.088353008778570 1.41289E-03
        3.49026E+02 3.088270355563460 1.40368E-03
        3.51315E+02 3.088188817360400 1.39453E-03
        3.53619E+02 3.088108378614150 1.38545E-03
        3.55938E+02 3.088029024018380 1.37642E-03
        3.58273E+02 3.087950738510320 1.36745E-03
        3.60622E+02 3.087873507265450 1.35854E-03
        3.62987E+02 3.087797315692530 1.34969E-03
        3.65368E+02 3.087722149428780 1.34090E-03
        3.67764E+02 3.087647994335200 1.33216E-03
        3.70176E+02 3.087574836492130 1.32348E-03
        3.72604E+02 3.087502662194910 1.31486E-03
        3.75048E+02 3.087431457949720 1.30629E-03
        3.77507E+02 3.087361210469550 1.29778E-03
        3.79983E+02 3.087291906670280 1.28932E-03
        3.82475E+02 3.087223533666930 1.28092E-03
        3.84984E+02 3.087156078770010 1.27258E-03
        3.87508E+02 3.087089529481930 1.26428E-03
        3.90050E+02 3.087023873493590 1.25605E-03
        3.92608E+02 3.086959098681050 1.24786E-03
        3.95183E+02 3.086895193102250 1.23973E-03
        3.97775E+02 3.086832144993870 1.23166E-03
        4.00383E+02 3.086769942768290 1.22363E-03
        4.03009E+02 3.086708575010550 1.21566E-03
        4.05652E+02 3.086648030475510 1.20774E-03
        4.08313E+02 3.086588298084970 1.19987E-03
        4.10990E+02 3.086529366924930 1.19205E-03
        4.13686E+02 3.086471226242930 1.18428E-03
        4.16399E+02 3.086413865445400 1.17657E-03
        4.19130E+02 3.086357274095130 1.16890E-03
        4.21879E+02 3.086301441908780 1.16128E-03
        4.24645E+02 3.086246358754430 1.15372E-03
        4.27430E+02 3.086192014649250 1.14620E-03
        4.30234E+02 3.086138399757170 1.13873E-03
        4.33055E+02 3.086085504386620 1.13131E-03
        4.35895E+02 3.086033318988320 1.12394E-03
        4.38754E+02 3.085981834153170 1.11662E-03
        4.41632E+02 3.085931040610120 1.10934E-03
        4.44528E+02 3.085880929224100 1.10211E-03
        4.47443E+02 3.085831490994060 1.09493E-03
        4.50378E+02 3.085782717051020 1.08780E-03
        4.53332E+02 3.085734598656100 1.08071E-03
        4.56305E+02 3.085687127198740 1.07367E-03
        4.59297E+02 3.085640294194810 1.06667E-03
        4.62310E+02 3.085594091284850 1.05972E-03
        4.65342E+02 3.085548510232390 1.05282E-03
        4.68394E+02 3.085503542922180 1.04596E-03
        4.71465E+02 3.085459181358580 1.03915E-03
        4.74557E+02 3.085415417663930 1.03237E-03
        4.77670E+02 3.085372244077000 1.02565E-03
        4.80802E+02 3.085329652951460 1.01897E-03
        4.83956E+02 3.085287636754330 1.01233E-03
        4.87130E+02 3.085246188064590 1.00573E-03
        4.90324E+02 3.085205299571750 9.99177E-04
        4.93540E+02 3.085164964074440 9.92667E-04
        4.96777E+02 3.085125174479080 9.86199E-04
        5.00035E+02 3.085085923798590 9.79773E-04
        5.03314E+02 3.085047205151110 9.73389E-04
        5.06615E+02 3.085009011758800 9.67047E-04
        5.09938E+02 3.084971336946580 9.60746E-04
        5.13282E+02 3.084934174141040 9.54486E-04
        5.16649E+02 3.084897516869310 9.48267E-04
        5.20037E+02 3.084861358757960 9.42089E-04
        5.23448E+02 3.084825693531970 9.35950E-04
        5.26880E+02 3.084790515013750 9.29852E-04
        5.30336E+02 3.084755817122150 9.23794E-04
        5.33814E+02 3.084721593871540 9.17775E-04
        5.37315E+02 3.084687839370960 9.11795E-04
        5.40839E+02 3.084654547823250 9.05854E-04
        5.44386E+02 3.084621713524260 8.99952E-04
        5.47956E+02 3.084589330862100 8.94088E-04
        5.51550E+02 3.084557394316450 8.88262E-04
        5.55167E+02 3.084525898457860 8.82475E-04
        5.58808E+02 3.084494837947180 8.76725E-04
        5.62473E+02 3.084464207534940 8.71012E-04
        5.66162E+02 3.084434002060890 8.65337E-04
        5.69875E+02 3.084404216453520 8.59699E-04
        5.73612E+02 3.084374845729630 8.54098E-04
        5.77374E+02 3.084345884994020 8.48533E-04
        5.81161E+02 3.084317329439170 8.43004E-04
        5.84972E+02 3.084289174345030 8.37511E-04
        5.88809E+02 3.084261415078860 8.32054E-04
        5.92671E+02 3.084234047095140 8.26633E-04
        5.96557E+02 3.084207065935540 8.21247E-04
        6.00470E+02 3.084180467229000 8.15896E-04
        6.04408E+02 3.084154246691890 8.10580E-04
        6.08372E+02 3.084128400128190 8.05298E-04
        6.12362E+02 3.084102923429880 8.00051E-04
        6.16378E+02 3.084077812577300 7.94839E-04
        6.20420E+02 3.084053063639750 7.89660E-04
        6.24489E+02 3.084028672776100 7.84515E-04
        6.28585E+02 3.084004636235540 7.79403E-04
        6.32707E+02 3.083980950358520 7.74325E-04
        6.36857E+02 3.083957611577800 7.69279E-04
        6.41034E+02 3.083934616419600 7.64267E-04
        6.45238E+02 3.083911961505010 7.59287E-04
        6.49469E+02 3.083889643551490 7.54340E-04
        6.53729E+02 3.083867659374660 7.49425E-04
        6.58016E+02 3.083846005890210 7.44542E-04
        6.62332E+02 3.083824680116110 7.39691E-04
        6.66676E+02 3.083803679175040 7.34872E-04
        6.71048E+02 3.083783000297080 7.30083E-04
        6.75449E+02 3.083762640822790 7.25326E-04
        6.79879E+02 3.083742598206480 7.20601E-04
        6.84338E+02 3.083722870020030 7.15905E-04
        6.88826E+02 3.083703453956920 7.11241E-04
        6.93343E+02 3.083684347836860 7.06607E-04
        6.97890E+02 3.083665549610880 7.02003E-04
        7.02468E+02 3.083647057366890 6.97429E-04
        7.07075E+02 3.083628869335980 6.92884E-04
        7.11712E+02 3.083610983899280 6.88370E-04
        7.16379E+02 3.083593399595730 6.83885E-04
        7.21078E+02 3.083576115130510 6.79429E-04
        7.25807E+02 3.083559129384620 6.75002E-04
        7.30567E+02 3.083542441425440 6.70604E-04
        7.35358E+02 3.083526050518480 6.66234E-04
        7.40181E+02 3.083509956140610 6.61894E-04
        7.45035E+02 3.083494157994750 6.57581E-04
        7.49922E+02 3.083478656026380 6.53296E-04
        7.54840E+02 3.083463450442090 6.49040E-04
        7.59790E+02 3.083448541730380 6.44811E-04
        7.64773E+02 3.083433930685180 6.40609E-04
        7.69789E+02 3.083419618432380 6.36435E-04
        7.74837E+02 3.083405606459920 6.32289E-04
        7.79919E+02 3.083391896651900 6.28169E-04
        7.85034E+02 3.083378491327550 6.24076E-04
        7.90183E+02 3.083365393285650 6.20010E-04
        7.95365E+02 3.083352605855530 6.15970E-04
        8.00581E+02 3.083340132955650 6.11957E-04
        8.05832E+02 3.083327979161380 6.07969E-04
        8.11117E+02 3.083316149783410 6.04008E-04
        8.16436E+02 3.083304650959180 6.00073E-04
        8.21791E+02 3.083293489759690 5.96163E-04
        8.27180E+02 3.083282674315020 5.92278E-04
        8.32605E+02 3.083272213962680 5.88419E-04
        8.38066E+02 3.083262119423610 5.84585E-04
        8.43562E+02 3.083252403012640 5.80776E-04
        8.49094E+02 3.083243078891330 5.76992E-04
        8.54663E+02 3.083234163374240 5.73233E-04
        8.60268E+02 3.083225675302290 5.69498E-04
        8.65910E+02 3.083217636501880 5.65787E-04
        8.71589E+02 3.083210072354290 5.62101E-04
        8.77305E+02 3.083203012508590 5.58438E-04
        8.83059E+02 3.083196491783770 5.54800E-04
        8.88850E+02 3.083190551323250 5.51185E-04
        8.94680E+02 3.083185240091480 5.47594E-04
        9.00548E+02 3.083180616841360 5.44026E-04
        9.06454E+02 3.083176752741810 5.40481E-04
        9.12398E+02 3.083173734949360 5.36959E-04
        9.18382E+02 3.083171671561410 5.33461E-04
        9.24405E+02 3.083170698644560 5.29985E-04
        9.30468E+02 3.083170990473980 5.26532E-04
        9.36570E+02 3.083172774916870 5.23101E-04
        9.42713E+02 3.083176357400580 5.19693E-04
        9.48895E+02 3.083182159922900 5.16307E-04
        9.55118E+02 3.083190788033790 5.12943E-04
        9.61382E+02 3.083203153831960 5.09600E-04
        9.67688E+02 3.083220722352610 5.06280E-04
        9.74034E+02 3.083246066831480 5.02981E-04
        9.80422E+02 3.083284351795970 4.99704E-04
        9.86852E+02 3.083348532272660 4.96448E-04
        9.93324E+02 3.083490599576370 4.93214E-04
CONDITIONS:
    deposition_temperature: 573